Analyses of multiple surfaces transform interferometry in parallel plate measurement

Abstract

Multiple surfaces transform interferometery is a preferred technology for surface profile and index homogeneity measurement using a Fourier based analysis method combined with phase-shifting interferometer. As a four-surface cavity for example, the surface form and index inhomogeneity of the parallel plate are deduced by extracting the information from the corresponding interference frequency. The errors of surface form and index homogeneity are simultaneously simulated and analyzed with different sampling buckets. The results show the feasibility and high precision of this approach compared with traditional methods.Multiple surface transform interferometry; Fourier based analysis method; phase-shifting interferometer; surface profile; index inhomogeneity;