Power skiving is a modern and productive method in the manufacturing of cylindrical internal gears and external gears. However, pose errors of workpiece and cutter are caused by clamping, cutting force, and deformation of heat, which make the tooth deviation present a feature of complexity and diversity in the process of gear skiving. First, a mathematical model with workpiece and cutter pose errors is proposed to investigate the influence of sensitive error on tooth deviation by an example of internal gear skiving. Second, the correlation of tooth deviation with respect to eccentric error of workpiece, eccentric error of cutter, tilt error of cutter, and the multiple errors is studied. The sensitive errors are derived from the tooth deviation by using an orthogonal analysis with workpiece and cutter pose errors. Last, the experimental results show the validity of the numerical analysis results, and the influence of sensitive pose errors on tooth deviation can be used to identify the possible error in power skiving, as well as in gear generating method.