Analysis and design of a fourth-order ΣΔ ADC for MEMS digital gyroscope sensors

Zhang, Huan; Chen, Weiping; Yin, Liang; Fu, Qiang

doi:10.1016/j.mejo.2023.105953

Microelectronics Journal

2023

DOI: 10.1016/j.mejo.2023.105953

|View full text |Cite

Analysis and design of a fourth-order ΣΔ ADC for MEMS digital gyroscope sensors

Huan Zhang,

Weiping Chen,

Liang Yin

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2024

Publication Types

Select...

Article2

Relationship

Self Cite0

Independent2

Authors

Journals

Cited by 2 publications

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Terahertz sensors for next generation biomedical and other industrial electronics applications: A critical review

Ajayan,

Sreejith,

Manikandan

et al. 2024

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

Terahertz sensors for next generation biomedical and other industrial electronics applications: A critical review

Ajayan,

Sreejith,

Manikandan

et al. 2024

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

Noise Analysis and Suppression Methods for the Front-End Readout Circuit of a Microelectromechanical Systems Gyroscope

He,

Xu,

Wang

et al. 2024

Sensors

View full text Add to dashboard Cite

Circuit noise is a critical factor that affects the performances of an MEMS gyroscope. Therefore, it is essential to analyze and suppress the noises in the key analog circuits, which are the main noise sources. This study presents an optimized front-end readout circuit and noise suppression methods. First, the noise analysis of the front-end readout circuit is carried out with theoretical derivation to clarify the main noise contributors. To suppress the output noise, an improved readout circuit based on the T-resistor networks is proposed, and the corresponding noise equation is derived in detail. In addition, the noise analysis of the critical circuits of the detection and control system, such as the inverting amplifiers, the first-order low-pass filters, and the first-order high-pass filters, is carried out, and the noise suppression strategy with the optimization of the resistances and is proposed. Taking the inverting amplifier as an example, the theoretical derivation is verified by measuring and comparing the output noises of different resistance schemes. In addition, the output noises of the gyroscope before and after circuit optimization are measured. Experimental results demonstrate that the output noise with the circuit optimization is reduced from 60 μV/Hz1/2 to 30 μV/Hz1/2 and the bias instability is reduced from 3.8 deg/h to 1.38 deg/h. In addition, the ARW is significantly improved from 0.035 deg/h1/2 to 0.018 deg/h1/2, which indicates that the proposed noise analysis and suppression methods are effective and feasible.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Analysis and design of a fourth-order ΣΔ ADC for MEMS digital gyroscope sensors

Cited by 2 publications

References 21 publications

Terahertz sensors for next generation biomedical and other industrial electronics applications: A critical review

Terahertz sensors for next generation biomedical and other industrial electronics applications: A critical review

Noise Analysis and Suppression Methods for the Front-End Readout Circuit of a Microelectromechanical Systems Gyroscope

Contact Info

Product

Resources

About