Analysis and Design of a Novel 3-DOF Translational and Rotational Elastomeric Bearing Positioning Stage

Abstract

Positioning stage plays an important role in precision mechanical system. Fast steering mirror mainly comprised of a rotational positioning stage and it has been widely used in laser manufacturing related applications. In this article, a novel 3-DoF translational and rotational positioning stage is proposed and designed. It utilizes elastomeric bearing for providing stiffness and has the advantages of small size and structurally simple. This stage is driven by three voice coil motors and measured by three capacitive displacement sensors. In order to establish the system dynamics, the rubber stiffness is also characterized in different loading manners by both simulation and experiment using a biaxial material testing system and a high strain compression testing system. The characterized hyperelastic behavior is modelled via Arruda-Boyce model, for subsequent finite element simulation. Based on these stiffness characterization and additional vibrational analyses, a 3-DOF stage dynamics model is developed and is validated using FEM. Preliminary stage realization and maneuver with the associated actuators and sensors have been demonstrated in this article. Furthermore, controller design and positioning experiment of stage will go on in the future.