Analysis and Improvement of a 3 Axis Accelerometer

Abstract

In this paper, an integrated 3-axis MEMS accelerometer was analyzed. Because of asymmetrical structure, z-axis sensing element, which was imbedded in the proof mass of lateral accelerometers, had large mechanical coupling. Simulation result showed that the cross talk in z-axis was as high as 64.3%. To solve the problem, a fully symmetrical structure with vertical springs was adopted in z-axis sensing element. The movement of z-axis was linear vertical displacement instead of torsional displacement. Simulation results showed there was no obvious cross talk in z-axis sensing element.