Analysis and verification on second-order nonlinearity in radio frequency bulk acoustic wave devices employing temperature compensation films
Masanori Ueda,
Toshio Nishizawa,
Satoshi Orito
et al.
Abstract:This paper discusses impact of SiO2/SiOF on the 2nd harmonic (H2) generation in temperature compensated (TC) film bulk acoustic resonators (FBARs). First, two types of TC-FBARs are fabricated and their H2 behavior is compared with that of the standard FBAR. Next, H2 characteristics of TC-layer are investigated by the use of series of TC-FBARs where SiOF and Cr layers are placed on the outside of electrodes. Simulations agree very well with measurements, and can explain well how the H2 response changes with the… Show more
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