Analysis of a thickness-shear mode vibrator for the accelerometer in vector hydrophones

Kim, Jungsuk; Pyo, Seonghun; Roh, Yongrae

doi:10.1016/j.sna.2017.09.007

Cited by 10 publications

(3 citation statements)

References 20 publications

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“…Research has focused on the theoretical analysis and functional verification of piezoelectric MEMS accelerometers in vector hydrophones to improve their design and performance. In 2017, Kim et al [ 24 ] developed a PMN-PT crystal vibrator for vector hydrophones to measure the magnitude and direction of acoustic signals. The voltage response equation of the PMN-PT crystal vibrator was derived to guide the design of shear moding accelerometers in vector hydrophones.…”

Section: Introductionmentioning

confidence: 99%

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Shi

Kang

et al. 2023

Micromachines

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In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with V = 8.412a − 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of –178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good “8” shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones.

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Section: Introductionmentioning

confidence: 99%

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Shi

Kang

et al. 2023

Micromachines

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“…Faced with the increasingly serious underwater security situation, it urgently needs to adopt new technologies and methods to meet the requirements of engineering application. MEMS technology, due to the characteristic of 3 M (miniaturization, multiplicity and microelectronics), shows great vitality [7][8][9][10]. To this end, scholars expect to resolve current problems of large volume, poor consistency, and high cost through MEMS technology.…”

Section: Introductionmentioning

confidence: 99%

Research on “Cylinder‐Four‐Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone

et al. 2021

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The existing MEMS bionic vector hydrophone has the problems of low-sensitivity and narrow-working band, and the sensitivity and working bandwidth cannot be improved simultaneously by changing the single microstructural parameter. In this paper, the MEMS bionic vector hydrophone microstructural parameters (length, width and height of cantilever, side length of the center block, height and radius of the rigid cylinder) have been optimized simultaneously to obtain a higher sensitivity at the almost same working bandwidth. Firstly, through the mechanical analysis of the microstructure, the objective function and feasible region are established to optimize the parameters of the microstructure, and a set of optimized parameters is obtained. Secondly, the optimized structure is verified by ANSYS simulation, and then, the optimized four-beam structure is fabricated by the MEMS manufacturing technology. Finally, these two kinds of hydrophones (the previous one and the optimized one) are produced, and their performance tests are carried out. The testing results show that the performances of the optimized hydrophone have been greatly improved, exhibiting a receiving sensitivity of −181.2 dB@1 kHz (increasing by 6.5 dB, 0 dB reference 1 V/μ Pa), the frequency response ranging from 20 Hz to 1 kHz which is the same working bandwidth as before, and a good dipole directivity. The optimization researches in this paper provide a method and idea for the performance improvement of the following MEMS vector hydrophone.

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“…For example, lead zirconate titanate ceramic was embedded in knee plants as a self-powered sensor to monitor the balance of ligamentous forces [14]. An accelerometer made of lead magnesium niobate-lead titanate (PMN-PT) crystals [15] was used to detect the change of acceleration. Also, BiFeO 3 -BaTiO 3 -based lead-free ceramic was used to fabricate a high-frequency current sensor [16], whose sensitivity reached 4.5 mV A −1 .…”

Section: Introductionmentioning

confidence: 99%

Investigation of shear piezoelectric fiber composite for flexible sensor application

Yan

Yuan

Zhang

et al. 2019

Smart Mater. Struct.

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In this paper, we demonstrate the availability of flexible shear piezoelectric fiber composite (SPFC) to sense the acceleration, shear stress and light levels of excitation. Two kinds of cantilever beam structures based on SPFC were employed to demonstrate the sensing performance. The sensor with sandwiched beam structure exhibits better sensitivity to the acceleration. In the three point bending test, the sensor shows the ability to detect the shear stress. Also, it was proved that the sensor was able to sense light levels of excitation. This work provides a potential application of the shear piezoelectric sensor to detect shear stress failure in structural health monitoring.

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Analysis of a thickness-shear mode vibrator for the accelerometer in vector hydrophones

Cited by 10 publications

References 20 publications

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Research on “Cylinder‐Four‐Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone

Investigation of shear piezoelectric fiber composite for flexible sensor application

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