2009
DOI: 10.1143/jjap.48.086502
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Analysis of Amorphous Alumina Thin Film Etching by Phosphate Buffer Using Surface Plasmon Resonance

Abstract: The optical surface plasmon resonance (SPR) phenomenon was used to estimate the etching rate for inorganic films. The etching rate for amorphous alumina films deposited by atmospheric chemical vapor deposition using a phosphate buffer (PB) solution was estimated by the SPR method using a multilayer structure of alumina/gold/chromium/optical glass. To demonstrate that the SPR technique can be used to measure film thickness, the decrease in the thickness of a film as a result of etching was confirmed by measurin… Show more

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