Analysis of an Ultra-precision Positioning System and Parametrization of Its Structural Model for Error Compensation

Denkena, Berend; Dahlmann, Dominik; Sassi, N.

doi:10.1016/j.procir.2016.06.054

Cited by 4 publications

(2 citation statements)

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“…If D b is the distance between the two y-direction measurement beam axes, then displacement measurement results x, y, and z are calculated as The system dynamic model and the interferometer measurement models can be integrated using Eqs. (15) and (16). After combining with Eqs.…”

Section: Measurement Model Of An Interferometermentioning

confidence: 99%

“…He and Chen [12], Chen and Li [13], and Bao and Mao [14] established dynamic models of ultra-precision positioning stages, including equivalent models of aerostatic bearings, and analyzed the influence of the stiffness characteristics of aerostatic bearings on the dynamic behavior of the stages. Denkena et al [15] established a finite element (FE) model of an ultraprecision positioning system and applied model order reduction to obtain a state space model for compensating dynamic errors. Li et al [16] used an FE model to analyze and optimize the natural frequency of a micro grinding machine tool structure that contains a vertical motion stage.…”

Section: Introductionmentioning

confidence: 99%

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Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

et al. 2019

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Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.

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Section: Measurement Model Of An Interferometermentioning

confidence: 99%