Laser ablation-inductively coupled plasma mass spectrometry (LA-ICP-MS) has been used for the determination of the composition and size of oxide particles consisting of SiO 2 , MnO, Al 2 O 3 , MgO and CaO on the surface of a glass or metal sample. The composition and size of multicomponent oxide particles such as MnO-SiO 2 , CaO-Al 2 O 3 and CaO-Al 2 O 3 -MgO evaluated by LA-ICP-MS are compared with those obtained by chemical analysis and by SEM observation. It is confirmed that LA-ICP-MS method has prospects to be applied for quick and simultaneous measurement of the composition and size of particles on the surface of metals in steelmaking industry. The difference between the particle size determined by LA-ICP-MS and that by SEM ranges from 6 to 13% on an average in the range of d V ¼ 7$40 mm.