“…1 The interface states are responsible for natural formation of a two-dimensional electron gas (2DEG), at the AlGaN/GaN interface and, on the other hand, for such undesired effects as virtual-gate formation and drain current collapse. [2][3][4][5][6][7] In spite of that, the main issues regarding interface states, i.e., their nature and density distribution D it ðEÞ in the most part of the AlGaN band gap is still under debate. In the literature, three main models of donor-like interface states were considered, namely a discrete level and states with uniform 2,[8][9][10] or U-shaped density distribution 5 in the AlGaN band gap.…”