Analysis of diffraction wavefront in visible-light point-diffraction interferometer

Wang, Daodang; Wang, Fumin; Zou, Hang; Zhang, Baowu

doi:10.1364/ao.52.007602

Cited by 24 publications

(11 citation statements)

References 20 publications

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“…The major parameters including exit aperture size, cone angle and NA of the submicron-aperture fiber determine the sphericity of point-diffraction wavefront, the effect of which could be estimated by the numerical analysis based on the FDTD method [14]. With the ray tracing method, the simulation is carried out to analyze the measurement error of absolute displacement introduced by point-diffraction wavefront error.…”

Section: Effect Of Point-diffraction Wavefront Errormentioning

confidence: 99%

“…The point-diffraction spherical wavefronts from two fibers, which are installed on the target to be measured, interfere with each other, and the absolute displacement of the target can be retrieved from the interference field. Thus, the fiber point-diffraction spherical wavefront [8][9][10][11][12][13][14] plays the role as ideal measurement reference, and it determines the achievable measurement accuracy of the system. The numerical aperture (NA) of traditional fiber PDI is smaller than 0.20 [4,5,[15][16][17].…”

Section: Introductionmentioning

confidence: 99%

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Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Wang

Liang

et al. 2017

SPIE Proceedings

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The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of pointdiffraction wavefront obtained in the experiment is in the order of 1×10 -4 λ (the wavelength λ is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 μm. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 μm, convergence rate (~90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.

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Section: Effect Of Point-diffraction Wavefront Errormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Wang

Liang

et al. 2017

SPIE Proceedings

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“…For the high-NA spherical wavefront emerging from a tiny aperture with the size comparable with or less than operating wavelength, the vector diffraction theory (that is a nonapproximate method) is required to realize the accurate estimation of diffracted wavefront error. In this section, numerical analysis based on finite difference time domain (FDTD) method (that is a vector diffraction theory) [27] is presented. Figure 10 shows the flow diagram for the simulation of point-diffraction wavefront based on FDTD method.…”

Section: Numerical Analysis Of Point-diffraction Wavefrontmentioning

confidence: 99%

Point Diffraction Interferometry

Wang¹,

Liang²

2017

Optical Interferometry

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The point diffraction interferometer (PDI) employs a point-diffraction spherical wavefront as ideal measurement reference, and it overcomes the accuracy limitation of reference optics in traditional interferometers. To overcome the limitation of measurement range either with pinhole (low light transmission) or with single-mode fiber (low NA), a single-mode fiber with narrowed exit aperture has been proposed to obtain the point-diffraction wavefront with both high NA and high power. It is a key issue to analyze the point-diffraction wavefront error in PDI, which determines the achievable accuracy of the system. The FDTD method based on the vector diffraction theory provides a powerful tool for the design and optimization of the PDI system. In addition, a high-precision method based on shearing interferometry can be applied to measure point-diffraction wavefront with high NA, in which a double-step calibration including three-dimensional coordinate reconstruction and symmetric lateral displacement compensation is used to calibrate the geometric aberration. The PDI is expected to be a powerful tool for high-precision optical testing. With the PDI method, a high accuracy with RMS value better than subnanometer can be obtained in the optical surface testing and submicron in the absolute three-dimensional coordinate measurement, demonstrating the feasibility and wide application foreground of PDI.

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“…The interferometers, such as Fizeau interferometer, Twyman-Green interferometer and point-diffraction interferometer, provide a feasible and noncontact way to test the wavefront from refractive surfaces with ultra-high accuracy in the order of nanometers [5][6][7]. However, the dynamic range of the interferometric testing is quite small, and it can only measure the surface departure within a few wavelengths from reference shape [8,9].…”

Section: Introductionmentioning

confidence: 99%

General testing method for refractive surfaces based on reverse Hartmann test

Wang

Gong

et al. 2017

Applied Optical Metrology II

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The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.

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Analysis of diffraction wavefront in visible-light point-diffraction interferometer

Cited by 24 publications

References 20 publications

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Point Diffraction Interferometry

General testing method for refractive surfaces based on reverse Hartmann test

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