2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials (EDM) 2022
DOI: 10.1109/edm55285.2022.9855067
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Analysis of Electromechanical Deformation of a MEMS Element of a Reflection-Type Dynamic Mask Based on a Torsional Micromirror

G. D. Demin
1
,
Pavel P. Kim
2
,
Mikhail M. Pozdnyakov
3
et al.
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