Analysis of Electrostatic MEMS Using Energy-Charge Landscape

Raman, Raghuram Tattamangalam; Ajoy, Arvind; Padmanabhan, Revathy

doi:10.1109/ted.2020.3018700

Cited by 5 publications

(7 citation statements)

References 28 publications

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“…Based on the design criteria to avoid pull-in given in Refs. [5], [25] and for the parameters listed in Table I, we obtain C f b = 35.91 fF. Note that the gap-closing voltage V GC3 is significantly greater than the pull-in voltage of the standalone MEMS actuator V P I1 , as shown in Fig.…”

Section: (A)mentioning

confidence: 79%

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Stable Deflection in Ferroelectric Negative-Capacitance Hybrid MEMS Actuator With Cubic Nonlinear Spring

Raman

Padmanabhan

Ajoy

2022

IEEE Trans. Electron Devices

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Section: (A)mentioning

confidence: 79%

“…The Hamiltonian (total energy) H M of the 1-DOF electrostatic MEMS actuator, driven by a voltage source V M , neglecting damping, is given by [10], [25]…”

Section: Hamiltonian Of the Hybrid Actuatormentioning

confidence: 99%

Stable Deflection in Ferroelectric Negative-Capacitance Hybrid MEMS Actuator With Cubic Nonlinear Spring

Raman

Padmanabhan

Ajoy

2022

IEEE Trans. Electron Devices

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“…The Hamiltonian (total energy) H M of the standalone electrostatic MEMS actuator (Fig. 1), is given by [15]…”

Section: Hamiltonian Of the Hybrid Actuatormentioning

confidence: 99%

“…Based on our earlier work on electrostatic MEMS actuators in Ref. [15], we relate the charge q to the Potential Energy (fJ) displacement x of the movable electrode, using the mapping function…”

Section: Hamiltonian Of the Hybrid Actuatormentioning

confidence: 99%

“…They solve the algebraic equations that describe the balance between the electrostatic attraction and spring restoring forces at equilibrium. Our earlier work [15] analyzes both the static and dynamic response of standalone MEMS actuators based on their energy-charge landscape. This technique can, in principle, be extended to analyze the hybrid actuator as well.…”

Section: Introductionmentioning

confidence: 99%

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Analysis of Ferroelectric Negative Capacitance-Hybrid MEMS Actuator Using Energy-Displacement Landscape

Raman,

Shibu,

Padmanabhan

et al. 2022

Preprint

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We propose an energy-based framework to analyze the statics and dynamics of a ferroelectric negative capacitance-hybrid Microelectromechanical System (MEMS) actuator. A mapping function that relates the charge on the ferroelectric to displacement of the movable electrode, is used to obtain the Hamiltonian of the hybrid actuator in terms of displacement. We then use graphical energy-displacement and phase portrait plots to analyze static pull-in, dynamic pull-in and pull-out phenomena of the hybrid actuator. Using these, we illustrate the lowvoltage operation of the hybrid actuator to static and step inputs, as compared to the standalone MEMS actuator. The results obtained are in agreement with the analytical predictions and numerical simulations. The proposed framework enables straightforward inclusion of adhesion between the contacting surfaces, modeled using van der Waals force. We show that the pull-in voltage is not affected, while the pull-out voltage is reduced due to adhesion. The proposed framework provides a physics-based tool to design and analyze negative capacitance based low-voltage MEMS actuators.

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Highly efficient diamond electromechanical transducer based on released metal–oxide–semiconductor structure

Liao

Sang

Sun

et al. 2021

Applied Physics Letters

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We propose and demonstrate an efficient, integrated, and customizable metal–oxide–semiconductor (MOS) actuator capable of active on-chip driving and tuning microelectromechanical resonators. A single-crystal diamond mechanical resonator with a hydrogen-terminated surface was utilized for demonstration. In this actuator, the electrical field applied to the gate tunes the width of the depletion region of the MOS capacitor on the cantilever and induces an actuation force. The proposed actuator overcomes the drawbacks of conventional actuators, such as the growth of piezoelectric materials, formation of p–n junctions, high dc voltages, and nanoscale air gaps. The actuator has various merits, such as low-power dissipation (∼pW), low-voltage operation (∼mV), and a tailored amplitude through a low dc bias of less than 1 V. The proposed actuator is universally applicable in all semiconductors compatible with complementary metal–oxide–semiconductor.

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Analysis of Electrostatic MEMS Using Energy-Charge Landscape

Cited by 5 publications

References 28 publications

Stable Deflection in Ferroelectric Negative-Capacitance Hybrid MEMS Actuator With Cubic Nonlinear Spring

Stable Deflection in Ferroelectric Negative-Capacitance Hybrid MEMS Actuator With Cubic Nonlinear Spring

Analysis of Ferroelectric Negative Capacitance-Hybrid MEMS Actuator Using Energy-Displacement Landscape

Highly efficient diamond electromechanical transducer based on released metal–oxide–semiconductor structure

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