Analysis of Frequency Response of IDT/ZnO/Si SAW Filter Using the Coupling of Modes Model

Abstract

A monolithic integration of filters on Si or GaAs substrates is highly desirable to miniaturize the outer dimensions of the cellular phones. But, direct monolithic integration of surface acoustic wave (SAW) filters is impossible with Si, which is nonpiezoelectric, and difficult with GaAs, which is weakly piezoelectric. One alternative is the deposition of a piezoelectric film on the semiconductor substrate. In this paper, we propose a modified coupling-ofmodes (COM) approach, which can be used in the practical design of a layered ZnO/Si SAW filter. This is a dispersive SAW-layered filter, and some of the COM parameters become frequency dependent due to the phase velocity dispersion. The frequency response of the 3-step ladder type ZnO/Si SAW filter is analyzed and compared with the experimental results.

Fabrication of a 3.5-GHz Solidly Mounted Resonator by Using an AlScN Piezoelectric Thin Film

“…There are many types of filters; among them, the acoustic wave filter is of the most concern. The acoustic wave filters can be divided into surface acoustic wave (SAW) filters [1] and bulk acoustic wave (BAW) filters [2,3]. Compared with surface acoustic wave filters, bulk acoustic wave filters can more easily achieve a high frequency range (>2 GHz), and have a smaller volume, excellent device characteristics, higher power endurance and wider application frequency range, among other advantages, which make the bulk acoustic wave filters highly valued in future mobile communication applications.…”

Surface Acoustic WaveAmmonia Sensors Based on ST-cut Quartz under Periodic Al Structure

“…By using the coupling-of-modes (COM) theory [ 22 - 24 ], we design a two-port resonator with an Al grating on ST-cut quartz to prove the accuracy of the propagation characteristics studied in this work. COM theory is a powerful analysis method in designing SAW devices.…”