The oil pressure limiter is crucial for ensuring the steady operation of the diaphragm compressor, but there is a lack of systematic research on its design method. This study conducted a theoretical analysis of the operation characteristics of the oil pressure limiter in diaphragm compressors, and established a simulation model. Furthermore, a test rig for the oil system of a 90 MPa diaphragm compressor was built to verify the accuracy of the model. The results indicated that the simulated oil pressure curve was in good agreement with the measured curve during the oil overflow process, which confirmed the reliability of the model used to study the oil pressure limiter. The study found that the operational stability of the pressure limiter was significantly influenced by the spring stiffness and valve ball diameter. The oil overflow pressure of the compressor could be made more precise and stable by increasing the valve ball diameter, but the structural size should also be sensible.