In this paper, the performance of dual-k spacer asymmetric underlap FinFET (DKAU-FinFET) is analyzed. The significance of using dual-k spacers is illustrated considering the parasitic outer fringing capacitance. The study also presents physical insights into inversion charge modulation by dual-k spacers in DKAU-FinFETs. In addition, the proposed device structure is analyzed for analog, RF, and digital circuit performances. Based on the performance analysis, the use of optimum inner high-k spacer thickness is proposed for reliable device performance.
IndexTerms-Analog, asymmetric underlap FinFET (AU-FinFET), fringing capacitance, high-k spacer, RF.Arka Dutta received the M.E. degree in electronics and telecommunication engineering from Jadavpur University, Kolkata, India, in 2012, where he is currently pursuing the Ph.D. degree.He is currently with the Nano Device Simulation Laboratory, Department of Electronics and Telecommunication Engineering, Jadavpur University, as a Senior Research Fellow. His current research interests include performance optimization, distortion characterization, and compact modeling of advanced nano CMOS devices.