Analysis of Hybrid Electrothermomechanical Microactuators With Integrated Electrothermal and Electrostatic Actuation

Alwan, Aravind; Aluru, N. R.

doi:10.1109/jmems.2009.2029211

Cited by 24 publications

(11 citation statements)

References 23 publications

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“…The boundary integral formulation is an efficient way of solving the Laplace equation for exterior-domain problems such as this one. Additional details about this procedure are given in [12,24].…”

Section: Cantilever Beammentioning

confidence: 99%

Analysis of the Effect of Spatial Uncertainties on the Dynamic Behavior of Electrostatic Microactuators

Alwan

Aluru²

2016

Commun. Comput. Phys.

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This paper examines the effect of spatial roughness on the dynamical behaviour of electrostatic microactuators. We develop a comprehensive physical model that comprises a nonlinear electrostatic actuation force aswell as a squeeze-film damping term to accurately simulate the dynamical behavior of a cantilever beam actuator. Spatial roughness is modeled as a nonstationary stochastic process whose parameters can be estimated from profilometric measurements. We propagate the stochastic model through the physical system and examine the resulting uncertainty in the dynamical behavior that manifests as a variation in the quality factor of the device. We identify two distinct, yet coupled, modes of uncertainty propagation in the system, that result from the roughness causing variation in the electrostatic actuation force and the damping pressure, respectively. By artificially turning off each of these modes of propagation in sequence, we demonstrate that the variation in the damping pressure has a greater effect on the damping ratio than that arising from the electrostatic force. Comparison with similar simulations performed using a simplified mass-spring-damper model show that the coupling between these two mechanisms can be captured only when the physical model includes the primary nonlinear interactions along with a proper treatment of spatial variations. We also highlight the difference between nonstationary and stationary covariance formulations by showing that the stationary model is unable to properly capture the full range of variation as compared to its nonstationary counterpart.

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Section: Cantilever Beammentioning

confidence: 99%

Analysis of the Effect of Spatial Uncertainties on the Dynamic Behavior of Electrostatic Microactuators

Alwan

Aluru²

2016

Commun. Comput. Phys.

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Section: Fig 11mentioning

confidence: 99%

A Nonstationary Covariance Function Model for Spatial Uncertainties in Electrostatically Actuated Microsystems

Alwan

Aluru

2015

Int. J. UncertaintyQuantification

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This paper presents a data-driven method of estimating stochastic models that describe spatial uncertainties. Relating these uncertainties to the spatial statistics literature, we describe a general framework that can handle heterogeneous random processes by providing a parameterization for the nonstationary covariance function in terms of a transformation function and then estimating the unknown hyperparameters from data using Bayesian inference. The transformation function is specified as a displacement that transforms the coordinate space to a deformed configuration in which the covariance between points can be represented by a stationary model. This approach is then used to model spatial uncertainties in microelectromechanical actuators, where the ground plate is assumed to have a spatially varying profile. We estimate the stochastic model corresponding to the random surface using synthetic profilometric data that simulate multiple experimental measurements of ground plate surface roughness. We then demonstrate the effect of the uncertainty on the displacement of the actuator as well as on other parameters, such as the pull-in voltage. We show that the nonstationarity is essential when performing uncertainty quantification in electrostatic microactuators.

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“…Based on the formulation of boundary-element method (BEM) and finite element analysis (FEA) [18]- [21], these methods can be used for a wide range of MEMS design. However, these algorithms directly sweep the voltage (i.e., solves the static problem at a set of monotonically increasing input voltages), and once the pull-in point is passed, they must find a solution which is no longer "near" the solution at the previous voltage.…”

Section: A Motivationmentioning

confidence: 99%

Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices

Zhang

Kamon²,

Daniel

2014

J. Microelectromech. Syst.

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Abstract-The voltages at which Micro-Electro-Mechanical (MEM) actuators and sensors become unstable, known as pullin and lift-off voltages, are critical parameters in MEMS design. The state-of-the-art MEMS simulators compute these parameters by simply sweeping the voltage, leading to either excessively large computational cost, or to convergence failure near the pull-in or lift-off points. This paper proposes to simulate the behavior at pull-in and lift-off employing two continuation-based algorithms. The first algorithm appropriately adapts standard continuation methods, providing a complete set of static solutions. The second algorithm uses continuation to trace two kinds of curves and generates the sweep-up or sweep-down curves, which can provide more intuition to MEMS designers. The algorithms presented in this paper are robust and suitable for general-purpose industrial MEMS designs. Our algorithms have been implemented in a commercial MEMS/IC co-design tool, and their effectiveness is validated by comparisons against measurement data and the commercial FEM/BEM solver CoventorWare.

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Analysis of Hybrid Electrothermomechanical Microactuators With Integrated Electrothermal and Electrostatic Actuation

Cited by 24 publications

References 23 publications

Analysis of the Effect of Spatial Uncertainties on the Dynamic Behavior of Electrostatic Microactuators

Analysis of the Effect of Spatial Uncertainties on the Dynamic Behavior of Electrostatic Microactuators

A Nonstationary Covariance Function Model for Spatial Uncertainties in Electrostatically Actuated Microsystems

Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices

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