2021
DOI: 10.1063/5.0030599
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Analysis of impedance matching for a spherical multi-degree-of-freedom ultrasonic motor

Abstract: A novel spherical multi-degree-of-freedom ultrasonic motor is designed, which can achieve three-degree-of-freedom motion through the cooperative drive of three built-in traveling wave stators. The novel ultrasonic motor has the characteristics of compact structure and high power density. Additionally, in order to solve the problem of impedance mismatch between the ultrasonic motor and the driving power supply, a semi-analytical method of impedance matching based on parallel resonance is proposed according to t… Show more

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Cited by 6 publications
(2 citation statements)
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“…Traditionally, the components of MPRs are manufactured by the CNC (computer numerical control) machining, and the robots can be fabricated by assembling the components and the piezoelectric actuating elements together with epoxy resin adhesive or bolts and nuts. [ 215 , 216 , 217 , 218 ] MPRs fabricated by the conventional CNC machining method usually use the metal material as the robot base, and have the advantages of high machining accuracy and high structural strength. However, the CNC machining method is difficult to process some special microstructures, which cannot meet the further miniaturization and special design requirements of MPRs.…”
Section: Manufacturing Methods and Materials For Mprsmentioning
confidence: 99%
“…Traditionally, the components of MPRs are manufactured by the CNC (computer numerical control) machining, and the robots can be fabricated by assembling the components and the piezoelectric actuating elements together with epoxy resin adhesive or bolts and nuts. [ 215 , 216 , 217 , 218 ] MPRs fabricated by the conventional CNC machining method usually use the metal material as the robot base, and have the advantages of high machining accuracy and high structural strength. However, the CNC machining method is difficult to process some special microstructures, which cannot meet the further miniaturization and special design requirements of MPRs.…”
Section: Manufacturing Methods and Materials For Mprsmentioning
confidence: 99%
“…Therefore, it cannot meet the needs of some scenes. To solve the problem of poor adaptability of multi-DOF actuators, it can be studied based on single-DOF actuators [ 13 , 14 , 15 , 16 ]. Although the single-DOF actuators have a single driving method, due to their flexible structure, they can cooperate with other actuators to achieve the purpose of multi-DOF driving.…”
Section: Introductionmentioning
confidence: 99%