2021
DOI: 10.2507/ijsimm20-2-563
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Analysis of Laser Interferometer Measurement Uncertainty by Simulating Error Sources

Abstract: The article presents measurement uncertainty analysis of accurate one-dimensional measurements with laser interferometers in precise industrial production and in calibration laboratories. To enable high measurement accuracy, environmental conditions shall be well controlled and laser interferometers, including air sensors, shall be calibrated periodically. Additionally, for calibration of measurement instruments and coordinate measuring machines, a positioning system, such as a video probe, shall be evaluated.… Show more

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Cited by 4 publications
(1 citation statement)
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“…At present, most high-precision, large-range displacement measurement systems are developed by using laser interferometry or traditional grating sensing. Laser interferometers have the highest accuracy, but they require precise alignment installation and very strict environmental control, which limits their application in industry [7,8]. Traditional grating displacement sensors include optical encoders, magnetic encoders, capacitive encoders and the inductosyn.…”
Section: Introductionmentioning
confidence: 99%
“…At present, most high-precision, large-range displacement measurement systems are developed by using laser interferometry or traditional grating sensing. Laser interferometers have the highest accuracy, but they require precise alignment installation and very strict environmental control, which limits their application in industry [7,8]. Traditional grating displacement sensors include optical encoders, magnetic encoders, capacitive encoders and the inductosyn.…”
Section: Introductionmentioning
confidence: 99%