Plasmon metal nanostructures are fundamental components integrated in sensing system of MEMS applications, mostly medicine and pharmacy. This paper cover main design aspects of microperiodic structures formed in different type nanocomposite films: metal/polymer with SPR effect and metal/polymer piezocomposite elements for detection and sensing purposes. Mathematical model of the system, using designed piezocomposite material with controllable properties by ultrahigh frequency excitation, was developed. This model allows to analyze the mechanical parameters of the system, which enables to control motion of cellbiological mechanisms in bio suspension and to force them to be attracted by metal nanoparticles, deposited on designed microperiodic structure in nanocomposite layer.