1987
DOI: 10.1016/s0168-583x(87)80228-8
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Analysis of oxygen on and in beryllium using 2 MeV helium ions

Abstract: Analysis of oxygen on beryllium can be routinely performed using heliumion backscattering (RBS). However, determination of the bulk oxygen concen tration by this technique is limited to about 350 atomic parts per million (appm). We have performed simultaneous RBS and particle-induced X-ray emission (PIXE) measurements to improve the detection limit for bulk oxygen.The RBS measurements allowed determination of the surface oxygen before and after in situ sputter cleaning by argon ions in an ultra-high-vacuum sys… Show more

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Cited by 8 publications
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