Gas Insulated Switchgear (GIS) has been widely used in substations. The insulating medium used in GIS is sulfur hexaluoride (SF 6 ) gas. However, the internal insulation defect existed in GIS would inevitably lead to partial discharge (PD), and cause the composition of SF 6 to SOF 2 , SO2F 2 and SO 2 and other characteristic component gases. The decomposition phenomenon would greatly reduce the insulation performance of SF 6 insulated equipment, and even paralyze the whole power supply system. In this chapter, we irst discuss the objective existence, decomposition mechanism and harmness of insulation defects. Then the methods for insulation defects detection used to avoid the insulation accidents are introduced. Comparing all of the detection methods, diagnosing the insulation defect through analyzing the decomposed gases of SF 6 by chemical gas sensors is the optimal method due to its advantages, such as high detection accuracy and stability, signifying the importance of developing chemical gas sensor used in SF6 insulated equipment. In conclusion, there kinds of gas sensor material, carbon nanotubes, graphene, are chosen as the gas sensing materials to build speciic gas sensors for detecting each kind of SF 6 decomposed gases, and then enhance the gas sensitivity and selectivity by material modiication.