2014
DOI: 10.1088/0022-3727/47/10/105401
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Analysis of plasma-induced morphological changes in sputtered thin films over compliant elastomer

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Cited by 21 publications
(23 citation statements)
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“…The resistance of the 15 nm G‐aC film to the dimensional changes of the soft substratum resulted in its delamination and cracking. This observation was consistent with previously reported studies of nichrome on polydimethylsiloxane substrata and palladium on polystyrene substrata …”
Section: Resultssupporting
confidence: 94%
“…The resistance of the 15 nm G‐aC film to the dimensional changes of the soft substratum resulted in its delamination and cracking. This observation was consistent with previously reported studies of nichrome on polydimethylsiloxane substrata and palladium on polystyrene substrata …”
Section: Resultssupporting
confidence: 94%
“…1c . Indeed, it is well known that the deposition of thin metal films onto the surface of PDMS can result in cracking of the metal 56 62 and, indeed, cracking of the PDMS surface 63 , as can thermal cycling 64 . Figure 1d shows the mud-crack patterning of the PDMS surface as a result of the process presented here for large surface metallization – as we will see, the mud-crack pattern density can be controlled via the plasma dose and the metallization thickness.…”
Section: Resultsmentioning
confidence: 99%
“…COF measurements were performed at 0.02, 0.05, and 0.1 N loads. Assuming elastic Hertzian deformation, and using reported values of 210 GPa and 0.3 for Young's modulus and Poisson's ratio, respectively, for both ball and plate materials [25,26] The XRD results for the three NiCr samples are shown in Fig. 2.…”
Section: Methodsmentioning
confidence: 99%