Analysis of Possibilities of Application of Nanofabricated Thermal Probes to Quantitative Thermal Measurements

Abstract

A steady-state thermal model of the nanofabricated thermal probe was proposed. The resistive type probe working in the active mode was considered. The model is based on finite element analysis of the temperature field in the probe-sample system. Determination of the temperature distribution in this system allows calculations of relative changes in the probe electrical resistance. It is shown that the modeled probe can be used for measurements of the local thermal conductivity with the spatial resolution determined by the probe apex dimensions. The probe exhibits the maximum sensitivity to the changes in the thermal conductivity of the sample between 2 W · m −1 · K −1 and 200 W · m −1 · K −1 . The influence of the thermal conductivity of the probe substrate on metrological characteristics of the probe as well as the thermal resistance of the probe-sample contact on the determination of the sample thermal conductivity were also analyzed. The selected results of numerical analysis were compared with data of preliminary experiments.

A Review on Principles and Applications of Scanning Thermal Microscopy (SThM)

“…Downsizing the Pt or NiCr thermoresistor by batch micro or nanofabrication, specifically through a series of low pressure chemical vapor deposition (CVD), micromachining, and electron beam lithography33g on 500 nm thick Si 3 N 4 , enabled a 100 nm spatial resolution thermistor probe as the tip dimension reached nanoscale, as shown in Figure . Commercial probes with Pd as core element, known as Kelvin nanotechnology (KNT) probes achieved sub‐100 nm spatial resolution and 0.1 K temperature resolution .…”

Quantitative Thermal Microscopy Measurement with Thermal Probe Driven by dc+ac Current

“…In this case, an interesting tool for the analysis of processes in the probe-sample system is numerical simulation based on the finite element method (FEM) [43][44][45][46][47]. So far, we have presented the probe-sample FEM model [39,48] which allowed accurate modeling of the basic physical processes occurring during the SThM measurement. It enabled the estimation of the dynamic range of signal changes and determining the highest sensitivity regime.…”

Analysis of New Materials in Automotive Construction in Term of the Vibration Properties

“…The paper presents some application of simulation and numerical methods for analysis of new material properties in dynamic research of vehicle systems. For proper analysis of those phenomena it is important to consider the mechanical, physical and chemical properties [32,33]. New materials used on suspension systems enable weight reduction while maintaining the required strength.…”