Third International Conference on Computer Communication and Network Security (CCNS 2022) 2022
DOI: 10.1117/12.2659134
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Analysis of SEMI EDA standards for semiconductor equipment data acquisition

Abstract: Based on the semiconductor equipment data acquisition standard, this paper analyzes the communication method between the fabrication client applications and the equipments. The common equipment model and the method of self-description of equipment nodes based on metadata are firstly studied in this paper, and then we research the security authentication and authorization mechanism between equipments and fabrication client applications. A method for client acquisiting semiconductor equipments data timely and fl… Show more

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“…SEMI SECS/GEM plays an important role in Industry 4.0. The photo-voltaic, semiconductor, solar cell manufacturing, surface mount technology (SMT), electrical construction, and device adopt SECS/GEM standards in their equipment [6][7][8]. With the introduction of SECS/GEM capability, it is quickly transforming its operations into a smart factory with M2M communication, automation, and real-time data acquisition for data monitoring, control, and analytics.…”
Section: Introductionmentioning
confidence: 99%
“…SEMI SECS/GEM plays an important role in Industry 4.0. The photo-voltaic, semiconductor, solar cell manufacturing, surface mount technology (SMT), electrical construction, and device adopt SECS/GEM standards in their equipment [6][7][8]. With the introduction of SECS/GEM capability, it is quickly transforming its operations into a smart factory with M2M communication, automation, and real-time data acquisition for data monitoring, control, and analytics.…”
Section: Introductionmentioning
confidence: 99%