Analysis of silicon carbide powder by ETV-ICP-AES

Záray, Gyula; Leis, F.; Kántor, Tibor; Haßler, Jürgen; Tölg, G.

doi:10.1007/bf00323713

Cited by 30 publications

(21 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…gasförmiger Form als Modifier zugesetzt werden [5][6][13][14][15], zur prinzipiellen Wirkungsweise der Modifier siehe detaillierte Angaben in [16].…”

Section: Siliciumcarbidunclassified

Spurenelemente in Halbleitern – eine analytische Herausforderung für die ETV ICP OES

Bertram

2006

Mat.-wiss. u. Werkstofftech.

View full text Add to dashboard Cite

Ziel der Untersuchungen war die Analyse von Spurenelementen in Halbleitermaterialien (Indiumphosphid, Siliciumcarbid, Aluminiumnitrid, Galliumarsenid). Durch Anwendung der ETV ICP OES als Methode der direkten Feststoffanalyse wird eine Verbesserung der Bestimmungsgrenzen im Vergleich zur klassischen Lösungs-analyse nach chemischen Aufschluss mit der ICP OES erreicht. Die Kalibrierung erfolgte mit eingetrockneten Standardlösungen bzw. mit Analytaddition. Die erhaltenen Ergebnisse zeigen die prinzipielle Eignung der ETV ICP OES zur Spurenelementbestimmung in Halbleitermaterialien.Schlüsselworte: Halbleiter, Spurenelemente, chemische Analyse, ETV ICP OES Direct analysis of solids is characterized by some benefits compared to dissolution-based methods. Techniques for the direct analysis of semiconductors (Indium phosphide, Silicon carbide, Aluminium nitride, Gallium arsenide) provide an advantageous alternative to methods using wet digestion in sample preparation. The calibration procedure is the major difficulty of all techniques applied for direct solid sample analysis, as there is a lack of suitable reference materials of semiconductors. Calibration was carried out using both dried liquid standards and the analyte-addition technique. ETV ICP OES can be a powerful technique for the determination of trace elements in semiconductors.

show abstract

“…gasförmiger Form als Modifier zugesetzt werden [5][6][13][14][15], zur prinzipiellen Wirkungsweise der Modifier siehe detaillierte Angaben in [16].…”

Section: Siliciumcarbidunclassified

Spurenelemente in Halbleitern – eine analytische Herausforderung für die ETV ICP OES

Bertram

2006

Mat.-wiss. u. Werkstofftech.

View full text Add to dashboard Cite

show abstract

“…The most appropriate method should be calibration by means of reference materials (15), but these are not always available in the necessary concentration range. Therefore, well-known models of calibration samples successfully used in old-fashioned spectrographic methods should be used.…”

Section: Analytical Calibration As a Fundamental Problem In Solid Sammentioning

confidence: 99%

“…A method using the ETV-ICP system with a thermochemical modifier for improving the evaporation of refractory elements (14), as well as a modified ETV-ICP system using Freon as a volatilizing additive (15), was also performed.…”

Section: Solid Sampling Systems In Spectrochemical Analysismentioning

confidence: 99%

Direct Spectrochemical Analysis of Solids: A Method for Characterization of Sediments

Flórián

Haßler²,

Pliešovská

et al. 1996

Microchemical Journal

View full text Add to dashboard Cite

“…As the ETV-systems could be used mainly up to temperatures about 2800°C, the pretreatment of samples with thermochemical additives, as they were used e.g. in [18,19], is necessary. As a matter of fact, only the "old fashioned" d. c.-arc achieves on the top of the carrier electrode a temperature of about 4000°C [22] and is therefore at present the only possible solid sampling method for non-diluted SiC.…”

Section: Introductionmentioning

confidence: 99%

“…Since SiC is one of the most important materials among advanced ceramics [9], the greatest interest in the development of spectro-analytical methods was directed towards it; an ETV-ICP system with thermochemical modifier [18], a modified ETV-ICP system using freon as volatilizing additive [19] as well as a slurry nebulization ICP-OES method [20] were reported. The applicability of GD-OES [13] and SS-ETV-AAS methods with the system boat-intube [15] was also discussed.…”

Section: Introductionmentioning

confidence: 99%

Comparison of various calibration techniques for the direct spectroscopical analysis of SiC powders

Flórián

Haßler²,

Schrön

1996

Analytical and Bioanalytical Chemistry

View full text Add to dashboard Cite

Techniques for the direct analysis of powdered advanced ceramics provide an advantageous alternative to methods using wet digestion in sample preparation. The direct spectrochemical methods based on electrothermal vaporization (ETV-ICP-OES, solid-ETV-AAS, etc.) show a great similarity to the classical method of d. c. arc excitation. The calibration procedure is the major difficulty of all techniques applied for direct solid sample analysis, as there is a lack of suitable reference materials of ceramics. Consequently, it was necessary to verify various possibilities of preparation and application of model calibration samples. The results of such a calibration are compared with those using within-laboratory standards.

show abstract

Analysis of silicon carbide powder by ETV-ICP-AES

Cited by 30 publications

References 12 publications

Spurenelemente in Halbleitern – eine analytische Herausforderung für die ETV ICP OES

Spurenelemente in Halbleitern – eine analytische Herausforderung für die ETV ICP OES

Direct Spectrochemical Analysis of Solids: A Method for Characterization of Sediments

Comparison of various calibration techniques for the direct spectroscopical analysis of SiC powders

Contact Info

Product

Resources

About