2023
DOI: 10.1016/j.optlastec.2022.108874
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Analysis of stresses and shape changes in thin substrates with stressed film patterning using femtosecond laser micromachining

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Cited by 4 publications
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“…Undoubtedly, ultrafast phenomena play an important role for current and future technologies. In current industrial application ultrafast lasers are used for high-precision micromachining and surface structuring of emerging materials [2], particularly in semiconductor and electronics industries for cutting and drilling microstructures [3]. In medical applications, ultrafast lasers are employed in laser eye surgery and dental treatments.…”
Section: Introductionmentioning
confidence: 99%
“…Undoubtedly, ultrafast phenomena play an important role for current and future technologies. In current industrial application ultrafast lasers are used for high-precision micromachining and surface structuring of emerging materials [2], particularly in semiconductor and electronics industries for cutting and drilling microstructures [3]. In medical applications, ultrafast lasers are employed in laser eye surgery and dental treatments.…”
Section: Introductionmentioning
confidence: 99%