Analysis of the extended operation range of electrostatic actuators by current-pulse drive

Castañer, Luís; Pons, Joan Puebla; Nadal-Guardia, R.; Rodríguez, Ángel

doi:10.1016/s0924-4247(01)00525-8

Cited by 55 publications

(46 citation statements)

References 14 publications

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“…These two forces are balanced through (3) looking at Figure 1(d) [27]. This balance strive is depicted in following equation [26]: Journal of Control Science and Engineering…”

Section: Operating Principlesmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage free of the malfunctioning noise and disturbance. Even though strenuous endeavors are made to fabricate MEMS tunable capacitors with desiderated accurate physical characteristics and ameliorate exactness of physical parameters' values, parametric uncertainties ineluctably emerge in fabrication process attributable to imperfections in micromachining process. First off, this paper considers applying an adaptive sliding mode controller design in the MEMS AC voltage reference source so that it is capable of giving off a well-regulated output voltage in defiance of jumbling parametric uncertainties in the plant dynamics and also aggravating external disturbance imposed on the system. Secondly, it puts an investigatory comparison with the designed model reference adaptive controller and the pole-placement state feedback one into one's prospective. Not only does the tuned adaptive sliding mode controller show remarkable robustness against slow parameter variation and external disturbance being compared to the pole-placement state feedback one, but also it immensely gets robust against the external disturbance in comparison with the conventional adaptive controller. The simulation results are promising.

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“…These two forces are balanced through (3) looking at Figure 1(d) [27]. This balance strive is depicted in following equation [26]: Journal of Control Science and Engineering…”

Section: Operating Principlesmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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“…If we now calculate the net spring constant, it can be shown that k net = k, independent of the applied charge. This shows that applying a constant charge leads to a solution that is always stable [9][10][11]. Compared to voltage control, charge control does not result in a pull-in point, but there is also no negative spring effect.…”

Section: Actuation and Readout With Parallel-plate Capacitorsmentioning

confidence: 82%

“…This signal is fed back to the input via the comb capacitor actuation circuit. The dominant electrical noise source is also drawn, which enters the loop after the dual charge integrator stage, given by equation (9). As the total loop gain will be very high for low frequencies, we can assume nullator at the input of the control loop.…”

Section: Complete Systemmentioning

confidence: 99%

A virtually floating dual-mass accelerometer

Bock

Woestyn

Raman

et al. 2013

Sensors and Actuators A: Physical

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A novel microelectromechanical system (MEMS) for the measurement of acceleration is presented. It combines a new mechanical structure consisting of two masses with a novel readout principle. The differential-mode displacement of the two proof masses corresponds to the applied acceleration and is embedded in a force-feedback loop. A new readout circuit is presented to give a readout proportional to this differential-mode. In addition, this new readout circuit has a control mechanism to operate the commonmode displacement of this dual-mass structure at the pull-in point. This increases the mechanical and electrical sensitivity.As a proof of concept, a prototype was designed for the complete system. The accuracy of the system is 4.1 µg/ √ Hz, which corresponds to the mechanical noise floor of the mechanical structure.

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“…Charge drive control using constant current sources is mostly preferred to extend the travel range of electrostatic micro-actuators [19][20][21][22][23]. Nevertheless, there are very few references in the literature as regards charge drive control on RF MEMS.…”

Section: Charge Drive Control (Resistive Damping)mentioning

confidence: 99%

On the investigation of a reliable actuation control method for ohmic RF MEMS switches

Spasos¹,

Nilavalan²

2011

Microelectronics Journal

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Efficient control of RF MEMS switches is a very important issue as it is correlated to main failure mechanisms/modes such as the impact force and bouncing phenomena which degrade their dynamic performance and longevity. This paper presents the control of a specific ohmic RF MEMS switches under three different actuation modes, a tailored pulse optimization method based on Taguchi's technique (voltage mode actuation control), resistive damping (charge mode actuation control) and finally the Hybrid actuation mode, which is a combination of the tailored pulse, the resistive damping and Taguchi's optimization technique. Coventorware simulations indicate that under optimized Tailored pulse and Hybrid actuation modes, the impact velocity is reduced by around 90%, the initial impact force by around 75% and the maximum bouncing displacement during the release phase by around 95%, while the switching speed is increased by around 20% compared with the step pulse control mode. The resistive damping control mode is inappropriate for this type of switch and only partial improvement during the pull-down phase has been achieved. 2Finally, a comparison between Hybrid and optimized tailored modes shows that Hybrid actuation mode excels with better switching characteristics and most importantly offers immunity to manufacturing and operation tolerances.

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Analysis of the extended operation range of electrostatic actuators by current-pulse drive

Cited by 55 publications

References 14 publications

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

A virtually floating dual-mass accelerometer

On the investigation of a reliable actuation control method for ohmic RF MEMS switches

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