Analysis of the laser oxidation kinetics process of In-In_2O_3 MTMO photomasks by laser direct writing

Xia, Feng; Zhang, Xinzheng; Wang, Meng; Liu, Qian; Xu, Jingjun

doi:10.1364/oe.23.029193

Cited by 9 publications

(3 citation statements)

References 29 publications

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“…The contact angle hysteresis for both chemically etched and laser-textured patterns also reflects the different wetting properties (see Tables S1 and S2, Supporting Information). This is because the laser beam melts the porous film and significantly reduces the roughness of the scanned areas (Figure e), , while the surrounding unscanned areas still keep the porosity and the superhydrophobicity. As a result, there is a significant difference in surface wettability at the edge of the laser-processed area (Figure f).…”

Section: Resultsmentioning

confidence: 99%

Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection

Wang¹,

Liu

Zhang

et al. 2017

ACS Appl. Mater. Interfaces

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139

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Directional water collection has stimulated a great deal of interest because of its potential applications in the field of microfluidics, liquid transportation, fog harvesting, and so forth. There have been some bio or bioinspired structures for directional water collection, from one-dimensional spider silk to two-dimensional star-like patterns to three-dimensional Nepenthes alata. Here we present a simple way for the accurate design and highly controllable driving of tiny droplets: by laser direct writing of hierarchical patterns with modified wettability and desired geometry on a superhydrophobic film, the patterned film can precisely and directionally drive tiny water droplets and dramatically improve the efficiency of water collection with a factor of ∼36 compared with the original superhydrophobic film. Such a patterned film might be an ideal platform for water collection from humid air and for planar microfluidics without tunnels.

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Section: Resultsmentioning

confidence: 99%

Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection

Wang¹,

Liu

Zhang

et al. 2017

ACS Appl. Mater. Interfaces

Self Cite

139

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“…Contrary to conventional thermal oxidation of metals achieved by furnace annealing, continuous wave laser or pulsed-laser irradiation allows to induce extremely localized surface modifications within well-defined regions, determined by the laser characteristics and physical properties of the material [5,6]. Within this context, nano and micropatterning of different structures like photomasks and diffractive optical elements can be achieved [7,8]. Laser-induced oxidation of Ti [7], Bi [9,10], Mo [11] and Fe [12] have been reported in the last years.…”

Section: Introductionmentioning

confidence: 99%

Formation of β-Bi2O3 and δ-Bi2O3 during laser irradiation of Bi films studied in-situ by spatially resolved Raman spectroscopy

Dı́az-Guerra

Almodóvar

Camacho-López

et al. 2017

Journal of Alloys and Compounds

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The formation of different phases of Bi 2 O 3 induced by laser irradiation of Bi films has been assessed in situ by micro-Raman spectroscopy as a function of laser wavelength, power density and irradiation time. Raman mapping of the irradiated samples enabled a spatially-resolved study of the distribution of the formed Bi 2 O 3 phases. Red laser (633 nm) irradiation was found to induce the appearance of b-Bi 2 O 3 , within a certain range of power densities, by diffusion-controlled processes. In contrast, ultraviolet (UV, 325 nm) laser irradiation, above a certain power density threshold, initially induces the formation of both b and d-Bi 2 O 3 phases. The amount of the produced d-Bi 2 O 3 phase increases by increasing the irradiation time, while that of the b phase follows the opposite trend. UV laser irradiation seems to be a suitable method to produce room temperature stable d-Bi 2 O 3 patterns on Bi films.

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“…For example, Liu's group used femtosecond laser direct processing of metal-transparent metal oxides. The fabrication mechanism is attributed to light-induced melt oxidation, which uses non-linear effects to limit the size of the oxidized region, enabling subwavelength processing [38,39] (Figure 1A). In 2020, Huang et alused femtosecond laser to process the 3D shell-like structures of gold films.…”

Section: Advances In Femtosecond Laser Preparation Of Precious Metal ...mentioning

confidence: 99%

Femtosecond Laser Fabrication of Noble Metal Plasma Nanostructures and Its Application-A Mini Review

et al. 2022

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Noble metal plasmonic nanostructures have a wide range of applications in surface-enhanced Raman scattering (SERS), solar energy conversion, optical imaging, biosensing, and many other fields due to their unique localized surface plasmon resonance effects and optical properties. In recent years, the fabrication method of noble metal plasmonic nanostructures has attracted a lot of research interest. Compared with traditional processing methods, femtosecond laser processing has the advantages of high processing resolution, small heat-affected zone, high processing flexibility, controllability, and ease of patterning, and has shown great potential for application in the fabrication method of noble metal plasmonic nanostructures. In this paper, the recent advances in the fabrication of noble metal plasmonic nanostructures by femtosecond laser are reviewed, followed by a discussion of the characteristics, advantages, and potential applications of the structures prepared by this method.

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Analysis of the laser oxidation kinetics process of In-In_2O_3 MTMO photomasks by laser direct writing

Cited by 9 publications

References 29 publications

Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection

Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection

Formation of β-Bi2O3 and δ-Bi2O3 during laser irradiation of Bi films studied in-situ by spatially resolved Raman spectroscopy

Femtosecond Laser Fabrication of Noble Metal Plasma Nanostructures and Its Application-A Mini Review

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