The rapid market need of MEMS (Micro Electromechanical System) and metal microparts
are increasing gradually. The plastic microforming has received more interests and applications in
MEMS because it ensures high precision and manufacturing efficiency. However, it raises the higher
demand on the microforming and plastic processing technology. Here we present one new process to
micro-extrude microparts with laser-aided heating method. The new process is to selectively heat the
workpiece with the laser radiation method to the suitable temperature that is between room
temperature and recrystallization temperature, and to extrude the workpiece. This process is
characterized by decreasing the influence of strain strengthening and lowering the resistance to
deformation, and increasing the uniformity of material flow. The key elements of the approach
concerning the warm micro-extrusion and temperature control, such as process parameters, laser
heating system, micro-extrusion die structure, have been advanced. Furthermore, an important aspect
of the research is that the developed system and theory of micro warm extrusion based on laser
heating can be explored for further investigation and understanding of plastic microforming.