2020
DOI: 10.1016/j.microrel.2020.113748
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Analysis of the successive breakdown statistics of multilayer Al2O3/HfO2 gate stacks using the time-dependent clustering model

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Cited by 3 publications
(2 citation statements)
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“…[9,18,19] In this paper, we mainly focus on the distribution of conductance levels after the BD jumps, while the distribution of the time to successive BD events was carefully examined in previous works. [39,40] In these previous analysis, it was demonstrated that the time-dependent clustering model (TDCM) is needed to explain the deviations from the Weibull model in the high percentile region of the first BD distribution. [41] Moreover, this was shown to be due to variability in the background current of the devices (probably related to insulator thickness variations).…”
Section: Resultsmentioning
confidence: 99%
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“…[9,18,19] In this paper, we mainly focus on the distribution of conductance levels after the BD jumps, while the distribution of the time to successive BD events was carefully examined in previous works. [39,40] In these previous analysis, it was demonstrated that the time-dependent clustering model (TDCM) is needed to explain the deviations from the Weibull model in the high percentile region of the first BD distribution. [41] Moreover, this was shown to be due to variability in the background current of the devices (probably related to insulator thickness variations).…”
Section: Resultsmentioning
confidence: 99%
“…It was also demonstrated that the successive BD distributions could be nicely fitted with the TDCM up to approximately the tenth event. [39] The disagreement between model and experiment for larger number of events was attributed to time correlations which can be positive or negative. [42][43][44] The absence of correlation means that the rate of BD path generation during stress does not depend on the BD time and/or spatial location of previously opened BD filaments.…”
Section: Resultsmentioning
confidence: 99%