2011
DOI: 10.1007/s12200-011-0188-z
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Analysis of TiO2 for microelectronic applications: effect of deposition methods on their electrical properties

Abstract: Metal oxide semiconductor (MOS) device down-scaling is a powerful driving force for the evolution of microelectronics. The downsizing rate of metal oxide semiconductor field effect transistors (MOSFETs) is really marvelous. Silicon dioxide (SiO 2 ) has served as a perfect gate dielectric for the last four decades. Due to physical limitations, leakage current, high interface trap charge it now needs to be replaced with higher permittivity dielectric material. Keeping the motivation for the search of high-k mate… Show more

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Cited by 27 publications
(16 citation statements)
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“…In the medical domain, TiO 2 NP are used as components for prosthetic implants (hip, knees, dental implants) or in intravenous injection [3][4][5]. TiO 2 NP are also found in other various applications like paint, glass, electronic and water treatment industries [6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…In the medical domain, TiO 2 NP are used as components for prosthetic implants (hip, knees, dental implants) or in intravenous injection [3][4][5]. TiO 2 NP are also found in other various applications like paint, glass, electronic and water treatment industries [6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…The great interest in TiO 2 as photocatalyst is related to its low-cost, non-toxicity, high stability and photoactivity, and earth-abundance [5][6][7][11][12][13][14][15]. TiO 2 commonly appears in the amorphous form or as three distinct crystalline phases: two tetragonal ones, anatase and rutile, and as an orthorhombic phase, brookite [16]. From these crystalline phases, rutile is the most stable, while anatase and brookite are metastable and can be converted to rutile upon heating [17].…”
Section: Introductionmentioning
confidence: 99%
“…TiO2 is a n-type semiconductor usually appearing in an amorphous state or as three crystalline phases: the tetragonal phases, anatase and rutile, and an orthorhombic phase, brookite [187]. Rutile is the most stable phase, in which both anatase and brookite are metastable, transforming to rutile when heated [188].…”
Section: Titanium Dioxidementioning
confidence: 99%