Analysis, simulation and fabrication of MEMS springs for a micro-tensile system

Liu, Rui; Wang, Wanjun; Li, Xueping; Mao, Shengping; Ding, Guifu

doi:10.1088/0960-1317/19/1/015027

Cited by 15 publications

(10 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Especially, the reported Young's modulus is much lower than 210 Gpa [15], [16]. A microtensile measuring method was developed by Rui Liu et al [17], [18], by which the samples fabricated in the same conditions as the microswitch were measured. Preliminary results show that the Young's modulus was around 100 Gpa.…”

Section: A Original Design With Compliant Bridge-type Beamsmentioning

confidence: 99%

Development of a Novel MEMS Inertial Switch With a Compliant Stationary Electrode

Cai¹,

Yang²,

Ding³

et al. 2009

IEEE Sensors J.

Self Cite

View full text Add to dashboard Cite

A novel microelecromechnical system (MEMS) inertial switch based on the surface micromachining technology was developed, which mainly consists of a proof mass as the movable electrode and a compliant stationary electrode above the proof mass, whose deformation during the contact process would enhance the contact effect and prolong the switch-on time. Based on the original design which had already realized the enhancing effect to some extent, the device structure was redesigned as a centrosymmetric structure with the stationary electrode changed from two bridge-type beams to one cross beam in order to reduce the off-axis sensitivity. More importantly, a contact point was installed on top of the proof mass, changing the effective contact area of the stationary electrode from its end to the center, which undergoes the largest deformation. Therefore, the contact effect would be improved further, which has been confirmed by the ANSYS transient simulation. This simulation combined with the Simulink dynamic simulation described the device behavior, which were in agreement with the drop hammer tests. The threshold acceleration of the redesigned inertial microswitch was around 70 g, and the tested switch-on time reached 30 s, more satisfactory than the original design.Index Terms-Compliant stationary electrode, inertial switch, microelecromechnical system (MEMS), surface micromachining technology, switch-on time.

show abstract

Section: A Original Design With Compliant Bridge-type Beamsmentioning

confidence: 99%

Development of a Novel MEMS Inertial Switch With a Compliant Stationary Electrode

Cai¹,

Yang²,

Ding³

et al. 2009

IEEE Sensors J.

Self Cite

View full text Add to dashboard Cite

show abstract

“…For microserpentine investigation, Barillaro et al designed two types of serpentine springs and analyzed their spring constants for out-of-plane motion through theoretical analysis and numerical analysis by using the finite element method [22]. Liu et al discussed the stress and stiffness of S-shaped springs and reported that the number of turns of springs has a significant effect on their stress and stiffness [29]. Yeh et al found that serpentine springs can provide a larger rotating angle than the springs of clamped straight beams in comb drive actuators [30].…”

Section: Introductionmentioning

confidence: 99%

Geometric Effect on the Nonlinear Force-Displacement Relationship of Awl-Shaped Serpentine Microsprings for In-Plane Deformation

2020

View full text Add to dashboard Cite

Even when made by brittle materials, awl-shaped serpentine microsprings (ASSMs) were found to have a nonlinear displacement–force relationship similar to springs made by ductile material. It is found that the nonlinear displacement–force relationship is due to the geometry and dimensions of the ASSMs. The geometric effect of the nonlinear force–displacement relationship of ASSMs for in-plane motion was investigated. A theoretical solution was derived to analyze this nonlinearity. By successfully fabricating and measuring an ASSM, the theoretical results agreed well with the experimental results. The results indicated that ASSMs have a nonlinear force–displacement relationship, which is similar to that of hardening springs. The taper angle has a significant effect on the nonlinear displacement of ASSMs. When the taper angle was small, no obvious effect appeared on the nonlinearity of the microsprings with different numbers of turns. When the beam length increased, the critical force for nonlinear deflection decreased.

show abstract

“…The optical images of the test chip and the specimen are shown in figures 1(k), (l). The design and fabrication details of the tensile test specimen are given in[11,12].…”

mentioning

confidence: 99%

An investigation of microstructure and mechanical properties of UV-LIGA nickel thin films electroplated in different electrolytes

Wang

Guo

et al. 2010

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

Different electrolytes are used to fabricate nickel structures in MEMS devices by the LIGA or UV-LIGA process to meet different requirements. In order to investigate the microstructure and mechanical properties of nickel thin films electroplated in different electrolytes, four sets of nickel specimens were fabricated in different electrolytes: sulfamate bath with both saccharine and butynediol added (type A-I); sulfamate bath with saccharine added (type A-II); watts bath with saccharine added (type B); and chloride bath with saccharine added (type C). The function of these additives was to obtain the stress-free nickel films. The specimens were measured in our uniaxial tensile test system; their surface morphology and fractography, microstructure and texture were studied by SEM, TEM and XRD, respectively. The results show that the four sets of specimens have different mechanical properties and microstructures. The tensile strength of type A-II, type C and type A-I specimens increases with decreasing grain size, which is in accordance with the Hall-Petch law. In contrast, type B specimens have the highest value of ultimate tensile strength and elongation, but with the largest grain size among all the specimens. The XRD results show that there is no preferred orientation in type B while others have a preferred orientation in (2 0 0) along the growth direction. This might be the reason for the difference between type B and other types.

show abstract

Analysis, simulation and fabrication of MEMS springs for a micro-tensile system

Cited by 15 publications

References 17 publications

Development of a Novel MEMS Inertial Switch With a Compliant Stationary Electrode

Development of a Novel MEMS Inertial Switch With a Compliant Stationary Electrode

Geometric Effect on the Nonlinear Force-Displacement Relationship of Awl-Shaped Serpentine Microsprings for In-Plane Deformation

An investigation of microstructure and mechanical properties of UV-LIGA nickel thin films electroplated in different electrolytes

Contact Info

Product

Resources

About