Analytical Auger Electron Spectroscopy

Surface Structure—Experimental Methods

“…Figure 5 is the Auger electron spectrum of 0 adsorbed on Si in approximately one-half monolayer coverage. (7) The individual lines in this spectrum have widths 5-10 eV, which is lbo 2bo 300 400 sOO 600 700…”

“…For AES the sensitivity is of the order of 1 % of a monolayer. (7) This estimate applies to every atom except H and He, which do not undergo Auger processes. The ability of AES to distinguish between neighboring elements of the periodic table is firmly established.…”

“…The primary beam can be characterized by its propagation vector K. Its direction is defined by the azimuthal and polar angles of incidence 4> and e (Figure 14). The inward surface normal and parallel components of the propagation vector are commonly denoted K.l and K II , respectively: (6) The relations of the modulus K of K to the electron kinetic energy E and the electron wavelength A are K = 21t/A (7) in which 21tn is Planck's constant and m is the electron mass. There should be no confusion between the wavelength A and the mean free path as presented in Section 3.2.1.…”

Electron-Specimen Interactions

“…These transitions are very rapid because they involve transitions within the one shell, e.g. of the type L 111 -+ L 11 and L 1 and L 11 -+ L 1 • The effect of this is to alter the relative intensities from those expected from the arguments given above, and in addition the energy available from these transitions may result in line broadening [23].…”

Problems in using surface analysis techniques for the depth profiling of microelectronic materials

“…spectroscopy (SIMS) [ 2 ] , Auger,electron spectroscopy (AES) [ 3 ] , and X-ray photoelectron spectroscopy (XPS) [ 4 ] , which is also known as ESCA (electron spectroscopy for chemical analysis). Data obtained using state of the art procedures in cooperative experiments at a number of laboratories using these various analytical techniques will be examined and compared for the case of zinc implanted in silicon.…”