Instrumentation: A Reader 1990
DOI: 10.1007/978-1-4613-2263-4_11
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Analytical instruments for process control

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Cited by 2 publications
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“…1 To have a healthy surrounding, it is fundamental to screen, identify, and control the surrounding humidity by advance humidity sensors. 2,3 Therefore, the requirements for healthy environmental conditions have prompted the advancements in humidity sensors by the utilization of chemical and physical characteristics of hybrid, inorganic, or organic materials. 4 Advancement in humidity sensory systems involves the improvement of transducer performance, for example, principle of mechanism, structure design, fabrication technologies, 5 and sensing elements.…”
Section: Introductionmentioning
confidence: 99%
“…1 To have a healthy surrounding, it is fundamental to screen, identify, and control the surrounding humidity by advance humidity sensors. 2,3 Therefore, the requirements for healthy environmental conditions have prompted the advancements in humidity sensors by the utilization of chemical and physical characteristics of hybrid, inorganic, or organic materials. 4 Advancement in humidity sensory systems involves the improvement of transducer performance, for example, principle of mechanism, structure design, fabrication technologies, 5 and sensing elements.…”
Section: Introductionmentioning
confidence: 99%
“…There are many ways to determine micro-traces of water in gases. An excellent review of moisture measurement techniques has been published by Carr-Brion [2] and techniques for humidity measurement in semiconductor process gases have also been reviewed [3,4]. However, most of them are qualitative or semi-quantitative methods because of the lack of effective and reliable calibration methods using standard mixture gases with micro-traces of water because these mixtures are almost impossible to prepare in the concentrations required.…”
Section: Introductionmentioning
confidence: 99%