Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design

Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 μm. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.

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“…The voltage sensitivity, S V , with the unit Vs 2 /m is the potential difference between the top and bottom electrode per acceleration [18],…”

Section: Electrical Properties Of Triaxial Accelerometermentioning

confidence: 99%

Triaxial MEMS accelerometer with screen printed PZT thick film

et al. 2010

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“…Recently, many accelerometers have been fabricated using micromachining techniques. The most popular are silicon based MEMS accelerometers . Three main working principles are utilized in the MEMS accelerometers: capacitive, piezoresistive and piezoelectric .…”

Section: Introductionmentioning

confidence: 99%

Preliminary Model and Technology of Piezoelectric Low Temperature Co‐fired Ceramic (LTCC) Uniaxial Accelerometer

Jurków

Dąbrowski

Gołonka

et al. 2013

Int J Applied Ceramic Tech

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Design procedure, technology and basic properties of a piezoelectric Low Temperature Co-fired Ceramics (LTCC) accelerometer are presented in this paper. The sensor consists of a LTCC membrane with a seismic mass. Meggitt InSensor ® PZT thick film has been applied as the sensing material. Finite element method (FEM) has been used to analyze the impact of the sensor geometry (membrane thickness, membrane and seismic mass radii) and PZT thick film placement on basic properties (sensitivity and bandwidth) of the device. The LTCC process was optimized in order to create thin and planar ceramic membrane with relatively huge seismic mass. Selected properties of the sensor have been measured and compared with the simulated ones.

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“…Both configurations adopt a central seismic mass and four suspension beams with one beam at each lateral side of the mass for the cross type, and two parallel beams at both ends of the mass for the parallel type. Hindrichsen et al (2009) presented a mechanical model based on full anisotropic material tensors and Euler's beam equation for the PZT thick-film triaxial microaccelerometer of a cross beam configuration. Parametric design of the accelerometer was proposed to achieve equal sensitivity in all three directions.…”

Section: Introductionmentioning

confidence: 99%

Modeling analysis of a triaxial microaccelerometer with piezoelectric thin-film sensing using energy method

Lee

Chang

et al. 2011

Microsyst Technol

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This study applies energy method to derive the system modeling of a triaxial microaccelerometer that consists of a quadri-beam suspension, a seismic mass, and displacement transducers using piezoelectric thin films. Two suspension beams support both ends of the seismic mass, which is fabricated by anisotropic etching of silicon. An out-of-plane acceleration will result in a symmetric bend, and in-plane accelerations will produce asymmetric bend and torsion of the suspension beams. Two piezoelectric thin-film transducers are arranged at both ends of each suspension beam. Eight transducers in total are interconnected such that triaxial accelerations can be measured selectively. The structure stiffness of the suspension beams considers both the silicon beams and piezoelectric films by the use of the laminated beam theory. Therefore, the analytical model is applicable to the accelerometers with thick piezoelectric films. The model is based on the anisotropic material properties of Silicon and PZT and Euler's beam equation with the assumptions that smaller strains and stresses are negligible. The analytical results of the resonant frequencies and sensor sensitivities to triaxial accelerations are presented and confirmed by finite element analysis.

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Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design

Cited by 23 publications

References 12 publications

Triaxial MEMS accelerometer with screen printed PZT thick film

Triaxial MEMS accelerometer with screen printed PZT thick film

Preliminary Model and Technology of Piezoelectric Low Temperature Co‐fired Ceramic (LTCC) Uniaxial Accelerometer

Modeling analysis of a triaxial microaccelerometer with piezoelectric thin-film sensing using energy method

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