2023
DOI: 10.1088/2631-8695/ace2ab
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Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Ahmad Rahbar Ranji,
Andy Li,
Shahpour Alirezaee
et al.

Abstract: Accurate estimation of the mechanical behavior of springs is crucial for the proper design of Microelectormechanical systems (MEMS). The main objective of this study is to derive a closed-form equation for the calculation of the stiffness of an inclined spring in the form of folded beams. The energy-based method was used to calculate the displacements of a folded beam that was fixed at one end and giuded at the other end. The analytical model was then compared with the finite element method using ANSYS for dif… Show more

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Cited by 4 publications
(4 citation statements)
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“…Figures 11-13 depict the frequency response of the ring due to an applied voltage o 5 + 0.1 sin 𝑤𝑡 V to electrodes 2 and 4. As seen, the radial displacement of a point on th ring at 𝜃 = 45 degrees is zero, which implies that the mode shape is n = 2 sense mode o vibration [31]. As seen, in rings made from silicon <111> and <100>, the major resonance frequency is in the sense mode of n = 2, while for rings of <110>, it is in drive mode.…”
Section: Harmonic Analysis Of the Nonrotating Ringmentioning
confidence: 74%
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“…Figures 11-13 depict the frequency response of the ring due to an applied voltage o 5 + 0.1 sin 𝑤𝑡 V to electrodes 2 and 4. As seen, the radial displacement of a point on th ring at 𝜃 = 45 degrees is zero, which implies that the mode shape is n = 2 sense mode o vibration [31]. As seen, in rings made from silicon <111> and <100>, the major resonance frequency is in the sense mode of n = 2, while for rings of <110>, it is in drive mode.…”
Section: Harmonic Analysis Of the Nonrotating Ringmentioning
confidence: 74%
“…Figures 8-10 depict the frequency response of the ring due to an applied voltage of 5 + 0.1 sin wt (V) to electrode number 2 and 5 − 0.1 sin wt (V) to electrode number 4. As seen, the radial displacement of a point on the ring at θ = 45 degrees is zero, which implies that the mode shape is a n = 2 sense mode of vibration [31].…”
Section: Harmonic Analysis Of the Nonrotating Ringmentioning
confidence: 81%
See 2 more Smart Citations