System dependability research is gradually making the transit of focusing on "fault time" to focusing on "fault process". The researches on dependability models of micro failure mechanism and macro fault behavior have become hot topics. The system fault behavior model describes the occurrence and development process of system fault in term of the behavior, and also presents the effect of basic unit failure on the whole system. The factors influencing the system fault behavior include the intrinsic factors such as material, structure, etc. and the extrinsic factors such as usage mode, environment, human factors, etc. The interactions between different types of factors lead to the complexity of the fault behavior models. On the basis of the frame of fault behavior model, this paper builds the system fault behavior model considering the effects of structural factors in term of the intrinsic factors. This paper adopts extended Petri Nets models to describe such model so that realize simulating the fault process. This method builds dependability model from a new angle, pays attention to process depicting, and describes the rules of the occurrence and development of system fault, which is a strong complement to the existing dependability theory. Under the condition, this paper puts forward the fault behavior model based on structure and its description method, which offers a kind of feasible technique to the frame of the fault behavior theory.