Analytical Study on Nanometer-Sized Ablation of Ultashort-Laser-Pulse for Alumina

Abstract

The ultrashort-laser-pulse micromachining of the alumina ceramics is theoretically investigated in this paper. Alumina is the important ceramic material in microelectronics packaging. However it is difficult to conduct the form process of Alumina ceramics due to their high hardness and brittleness. The ultrashort-pulse laser is applicable tool for micromachining of Alumina. This study considers the energy balance at the solid-vapor interface to be the material removal mechanism. The thermal transport equation with the energy balance at the solid-vapor interface is employed to analyze the shape of Alumina ablated by ultrashort-pulse-laser. The ablation depth per pulse and squared diameter predicted by this work are compared with the available experimental data. The effects of material properties and laser parameters on the ablated shape are also presented.