2012
DOI: 10.1016/j.diamond.2012.01.022
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Analytical TEM study of CVD diamond growth on TiO2 sol–gel layers

Abstract: The early growth stages of chemical vapor deposition (CVD) diamond on a sol-gel TiO 2 film with buried ultra dispersed diamond seeds (UDD) have been studied. In order to investigate the diamond growth mechanism and understand the role of the TiO 2 layer in the growth process, high resolution transmission electron microscopy (HRTEM), energy-filtered TEM and electron energy loss spectroscopy (EELS) techniques were applied to cross sectional diamond film samples. We find evidence for the formation of TiC crystall… Show more

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Cited by 16 publications
(11 citation statements)
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“…The film decreases duration of diamond nucleation phase by effective Ti‐C reactions and enhance nucleation by slight increase of surface roughness. The enhancement of nucleation by means of interlayers and roughness induced effects has been shown by a number of authors . A very thin (monoatomic) transition layer of titanium dioxide (TiO 2 ), due to its refractive index close to the one of diamond, may reduce the optical effect, mainly reflection, caused by the introduction of such layer to optical sensors.…”
Section: Introductionmentioning
confidence: 99%
“…The film decreases duration of diamond nucleation phase by effective Ti‐C reactions and enhance nucleation by slight increase of surface roughness. The enhancement of nucleation by means of interlayers and roughness induced effects has been shown by a number of authors . A very thin (monoatomic) transition layer of titanium dioxide (TiO 2 ), due to its refractive index close to the one of diamond, may reduce the optical effect, mainly reflection, caused by the introduction of such layer to optical sensors.…”
Section: Introductionmentioning
confidence: 99%
“…This carbon diffusion and conversion from diamond to amorphous carbon made the seed areas below the TiO 2 layer grow and bend the TiO 2 layer upwards to create the nucleation center of the diamond film. 65 These recent findings strongly support the crucial role of carbon diffusion in the diamond nucleation and film formation stages. In conclusion, it is expected that the carburization and the fast accumulation of carbon atoms within the subsurface region of all the seed nanolayers of the Group 4-6 transition metals under investigation in this study, in combination with the number density of initially embedded ND particle seeds, determine the nucleation rate of diamond.…”
Section: Acs Paragon Plus Environmentmentioning
confidence: 55%
“…It essentially provided a full encapsulation of the substrate. Before deposition the silicon was pre‐treated by with a colloidal suspension of 5–10 nm detonation diamond (NanoCarbon Institute Co., Ltd., Japan) to increase diamond nucleation 20. After the first deposition run, covering one side of the substrate, this procedure was repeated to ensure a high seeding density at the other side, still showing the uncovered silicon substrate.…”
Section: Methodsmentioning
confidence: 99%