Anchor Loss in MEMS/NEMS

High surface-area carbon microcantilevers

“…We expect that non-fluid losses, both those due to clamping losses and thermoelastic damping, could be significantly reduced in future CNT-M resonator designs through the use of narrow anchors placed at vibrational antinodes. 19 There is also significant room to reduce fluid damping further through the design and fabrication of CNT-M cantilevers with different geometries including thicker cantilevers. Whereas these cantilevers were grown to heights of ∼200 μm, the CNT-M process has recently been used to fabricate structures with growth heights >1 mm.…”