Angle-resolved annular data acquisition method for microellipsometry

Abstract

An ellipsometric data acquisition method is introduced to measure the optical properties of sample. It is based on a microellipsometer hardware layout integrated a high numerical aperture objective lens, which is aligned in the normal direction of sample surface. This technique enables to achieve ellipsometric data at multiple incident angle with a sub-mum probe beam size, moreover real-time measurement is possible due to no moving parts. The experimental results of different SiO(2) thin film are demonstrated, also calibration technique is described.

Novel wide-angle ellipsometric arrangement for thin film thickness measurement

“…Ellipsometry Three measurements with the analyzer A set at 0°, 45°and 90°are sufficient to determine the parameters ψ and Δ with P fixed at azimuth 45° [6]. The intensity at the detector is given as [7] a a a a Where α 2 is the analyzer orientation and s 0 , s 1 and s 2 are the Stokes parameters defined as [5]…”

Phase-image-correlation-based high sensitive optical nanoscope

“…It is also similar to the angle resolved micro-ellipsometric scheme [3]. It mainly consists of an object lens, a reference mirror, a polarizer and a CCD camera as shown in Fig.…”

“…And also, there have been some studies on angle resolved annular data acquisition approaches for microellipsometry with a high numerical aperture object lens, which is aligned in the normal direction of the sample surface. This technique enables to achieve ellipsometric data at multiple incident angle with a sub μm probe beam size, moreover real time measurement is possible due to no moving parts [3]. For such scatterometry, the rigorous coupled-wave analysis (RCWA) algorithm is usually used to explain the diffraction of electromagnetic waves from the periodic surface of grating structures [4,5].…”

Rotatable Offner imaging system for ellipsometric measurement

“…Imaging ellipsometry integrates high spatial resolution of optical microscopy and sensitive measurement capability of ellipsometry. Several high resolution imaging ellipsometers have been developed for laboratory researches [1][2][3][4] and some are commercially available. 5 The high resolution of these imaging ellipsometers is obtained by placing high numerical aperture (NA) objective lens between the sample and image device, which copes with the measurement of small regions (square micrometer order) of the sample surface.…”