1987
DOI: 10.1002/sia.740100502
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Angle‐resolved XPS studies of oxides at NbN, NbC, and Nb surfaces

Abstract: NbN, NbC and Nb are known to be chemically inert with passivating oxides only solvable in HF acid. Despite Nb,O, as outermost oxide layer, the oxides of Nb compounds show large differences in thickness and in electronic properties. To quantify the differences, angle-resolved XPS (ARXPS) measurements have been performed. The The oxide growth ( a H c ) is not planar; instead, the oxides serrate the metal surface on an nm scale. The serration is strongest for the soft Nb and smallest for the harder compounds NbN … Show more

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Cited by 210 publications
(108 citation statements)
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“…Essentially, this means that the oxide overlayer is not perfectly flat. This type of serration was also observed by Darlinski and Halbritter in their ARXPS studies of Nb and NbC [35].…”
Section: Surface Characterization Of Coatingssupporting
confidence: 80%
See 2 more Smart Citations
“…Essentially, this means that the oxide overlayer is not perfectly flat. This type of serration was also observed by Darlinski and Halbritter in their ARXPS studies of Nb and NbC [35].…”
Section: Surface Characterization Of Coatingssupporting
confidence: 80%
“…Lorentzian-Gaussian functions were used to represent Nb 2 O 5 at 207.4 eV, Nb-C at 204.2 eV, and Nb-Nb at 202.5 eV. The fits were in good agreement with the cited studies [34,35] except for the present addition of a strong asymmetric tail modifier for the conducting compounds Nb-C and Nb-Nb. The reason for the modifier is to account for Nb3d asymmetry and limit the number of model bands [36].…”
Section: Surface Characterization Of Coatingssupporting
confidence: 68%
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“…All the Bi 2 Se 3 -NbN bilayers in the present study were obtained using an "in-situ" process where both the 3 nm thick NbN film and the 10 nm thick Bi 2 Se 3 cap layer were prepared in the same deposition run without breaking the vacuum. This kept the interface between the NbN and Bi 2 Se 3 layers protected against contamination and oxidation which occur if the NbN surface is exposed to air [17,35]. Transport measurements were done using an array of 40 gold coated spring loaded spherical tips for the 4-probe measurements on 10 different locations on the wafer (Ci with i = 1-10, 4 contacts for each location).…”
Section: Methodsmentioning
confidence: 99%
“…Oxide films of niobium and its compounds are covered by a great amount of works, i.e. [2][3][4][5]. However, there are no works covering layer phase profiling of oxidized thin films of niobium compounds.…”
mentioning
confidence: 99%