We report here broadband membrane reflectors based on Fano resonances in patterned silicon nanomembranes. Resonance control of the reflectors was realized either by partially removing buried oxide layer underneath the device layer or by controlled SiO 2 film deposition on top of the devices. Both blueshifts and redshifts were demonstrated with a turning range of 50 nm for a center wavelength of 1550 nm. These results demonstrate practical postprocess means for Fano resonance engineering for both narrowband filters and ultracompact broadband reflectors. © 2009 American Institute of Physics. ͓DOI: 10.1063/1.3182801͔ Surface-normal ultracompact narrowband optical filters and broadband reflectors are essential components for numerous device applications. They can be used in optical switches, modulators, lasers, sensors, and beam steering devices. One-dimensional subwavelength grating ͑SWG͒ structures have long been recognized for this purpose. Both narrowband filters and broadband mirrors 1-4 based on SWG have been demonstrated. On the other hand, two-dimensional photonic crystal slab ͑2D PCS͒ structures hold great promises in realizing more compact photonic devices and they can be used for both in-plane and vertically coupled light guiding and manipulating. In this regard, Fano resonance can be explored for device applications. Based on Fano resonances, out-of-the-plane optical mode coupling in 2D PCS becomes feasible because the in-plane guided resonances above the lightline are strongly coupled to the out-of-the-plane radiation modes due to phase matching provided by the periodic lattice structure. 5 In recent years, devices based on Fano resonances such as narrowband filters 1,4 and broadband reflectors 6-8 have been reported. Recently, we also reported narrowband Fano filters and broadband membrane reflectors with patterned silicon nanomembranes ͑SiNM͒ transferred onto glass and flexible polyethylene terephthalate substrates, 9 employing a low temperature wet-transfer process. 10,11 The angular and polarization properties of Fano filters can also be tailored with the dispersion engineering, which is highly desirable for photonic integration applications. 11,12 However, none of the previous works demonstrated resonance control which is needed in many practical applications.Here we report the postfabrication resonance control for broadband membrane reflectors with precise control of cavity resonances, based on the effective index control of low index medium surrounding patterned SiNM device layers. The membrane reflector design was carried out based on three-dimensional finite difference time-domain simulations and rigorous coupled-wave analysis techniques. 11,12 With the control of design parameters, broadband reflectors with various spectral bandwidths and different peak reflections can all be realized. The PCS structure was fabricated on silicon-oninsulator ͑SOI͒ wafers, using e-beam lithography and plasma dry-etching processes. 11 The target wavelength is around 1550 nm.A membrane reflector fabricated on the ...