Angular distribution of sputtered particles induced by ion bombardment

Lee, Chin Shuang; Liu, Ya Chun; Chen, Yung Hung; Lee, Shyong

doi:10.1016/j.nimb.2004.01.057

Nuclear Instruments and Methods in Physics Research Section B:

2004

DOI: 10.1016/j.nimb.2004.01.057

|View full text |Cite

Angular distribution of sputtered particles induced by ion bombardment

Chin Shuang Lee

Ya Chun Liu

Yung Hung Chen

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2004

2005

Publication Types

Select...

Article3

Relationship

Self Cite0

Independent3

Authors

Journals

Cited by 3 publications

(1 citation statement)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The mass spectrometry of secondary ions emitted during irradiation with high‐energy primary ions is rather rare in the literature. A design similar to that presented here is described in a recently published paper 20…”

mentioning

confidence: 99%

Experimental apparatus for investigation of sputtering and secondary ion emission induced by energetic ion beams

Droździel

Pyszniak

Sielanko

et al. 2005

Rapid Comm Mass Spectrometry

View full text Add to dashboard Cite

The construction of an experimental apparatus, for investigation of implantation, secondary ion emission and sputtering processes, during irradiation of samples with an ion beam of up to 70 keV energy, is described. The basis of the apparatus is an electromagnetic mass separator equipped with a quadrupole mass spectrometer located in the collector chamber. The computer data acquisition control system makes it possible to perform the experimental measurements with high accuracy and precision. Preliminary results of secondary ion mass spectral measurements, obtained for C, Al, Si and Cu targets bombarded with Ar(+) and Kr(+) ions, are presented.

show abstract

mentioning

confidence: 99%

Experimental apparatus for investigation of sputtering and secondary ion emission induced by energetic ion beams

Droździel

Pyszniak

Sielanko

et al. 2005

Rapid Comm Mass Spectrometry

View full text Add to dashboard Cite

show abstract

Mass analysis of sputtered particles induced by Ar bombardment of two iced targets, H2O and CO2

Lee

Liu

Chen

et al. 2004

Nuclear Instruments and Methods in Physics Research Section B:

View full text Add to dashboard Cite

The measurement of sputtering yields and spectrum of mass and optical emission of sputtered particles induced by ion bombardment of H2O ice

Lee

Chueh

Liu

et al. 2005

Nuclear Instruments and Methods in Physics Research Section B:

View full text Add to dashboard Cite

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Angular distribution of sputtered particles induced by ion bombardment

Cited by 3 publications

References 8 publications

Experimental apparatus for investigation of sputtering and secondary ion emission induced by energetic ion beams

Experimental apparatus for investigation of sputtering and secondary ion emission induced by energetic ion beams

Mass analysis of sputtered particles induced by Ar bombardment of two iced targets, H2O and CO2

The measurement of sputtering yields and spectrum of mass and optical emission of sputtered particles induced by ion bombardment of H2O ice

Contact Info

Product

Resources

About