Anisotropic stress mechanisms for different dielectric multi-layer films deposited by ion-beam assisted deposition on flexible substrates

Chen, Hsi-Chao; Lu, Yu-Ru; Chen, Sheng-Bin

doi:10.1016/j.tsf.2023.140026

Thin Solid Films

2023

DOI: 10.1016/j.tsf.2023.140026

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Anisotropic stress mechanisms for different dielectric multi-layer films deposited by ion-beam assisted deposition on flexible substrates

Hsi-Chao Chen,

Yu-Ru Lu,

Sheng-Bin Chen

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2024

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Cited by 3 publications

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Stress mechanism analysis by finite element method for different dielectric films deposited with ion-beam assisted deposition on flexible substrates

Chen,

Lu,

Chang

2024

Thin Solid Films

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Stress mechanism analysis by finite element method for different dielectric films deposited with ion-beam assisted deposition on flexible substrates

Chen,

Lu,

Chang

2024

Thin Solid Films

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Optical response and temperature shielding coatings using tri-layer structure composed of titania/silica/titania

Yepuri,

Balamurugan

2024

AIP Advances

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The fabrication of metamaterials with inspiration from nature paved the door for the creation of revolutionary passive and active devices. Butterfly wings are one of them, and their multilayered structure motivated nanotechnologists, physicists, and other optoelectronic and photonic engineers to develop photonic crystals, dielectric reflectors, and Bragg reflectors for use in visible light communication, solar cells, and other photonic and optoelectronic applications. We report the sol–gel spin coating of a dielectric reflector on the glass substrate, an optical passive component consisting of titania and silica thin films for infrared radiation reflection. Individual thin films of titania and silica on glass substrates were studied using an x-ray diffractometer, which indicated anatase of titania and the amorphous nature of silica at a Bragg angle of 25° with a sharp and wide peak, respectively. The multilayer structure of titania/silica/titania was further investigated using Fourier transform infrared spectroscopy, which revealed the presence of Ti–O–Ti and Si–O–Si vibrational bonds at wavenumbers 546 and 973 cm−1, respectively, as well as the presence of Ti–O–Si vibrational bond at 1100 cm−1. The thickness of the multilayer titania/silica/titania was measured using a cross-sectional field emission scanning electron microscope (FESEM) and found to be 160/240/160 nm, respectively. Finally, reflection investigation on the multilayer structure using ultraviolet–visible–near-infrared spectroscopy validated the reflection of the infrared spectrum area by around 70% and showed to be beneficial for temperature shielding applications on glass furnishings.

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Optical and stress properties of ZrO₂/SiO₂ and TiO₂/SiO₂ anti-reflective coatings deposited by ion-beam-assisted deposition on a flexible substrate

Chen,

Chang,

Chen

2024

Appl. Opt.

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Dielectric films of ZrO2,TiO2, and SiO2 were deposited on flexible polycarbonate (PC) and polyethylene terephthalate (PET) substrates by using ion-beam-assisted deposition (IBAD). Each layer had a thickness ranging from 30 to 210 nm. The optical and anisotropic stress properties were investigated. Two anti-reflective coatings (ARCs), ZrO2/SiO2 and TiO2/SiO2, were selected and deposited on the PET flexible substrate. The anisotropic stresses of the single layer and ARCs were measured using a phase-shifting moiré interferometer. Experimental results showed that the optimal oxygen flow rates for the ZrO2,TiO2, and SiO2 films deposited with IBAD were 10, 10, and 15 sccm, respectively. The refractive index (n) was TiO2(2.37)>ZrO2(2.05)>SiO2(1.46), and the extinction coefficient (k) for all samples was below 10−3. The thermal expansion coefficient of the PC substrate was three times that of the PET substrate, and the high-refraction ZrO2 and TiO2 single-layer films presented cracks and distortions on the PC substrate. Only the low-refractive-index SiO2 sample did not present cracks. The three dielectric films did not crack or distort when deposited on the PET substrate. The anisotropic stress analysis provided the maximum principal and shear stresses for the three dielectric films on the PET substrate. Therefore, the maximum principal stress of the 210 nm single-layer film on a PET substrate is TiO2>ZrO2>SiO2. It was also discovered that the principal stress of the AR multilayer film is significantly decreased due to the damping stacking effect (DSE) of the high- and low-refractive-index materials, ZrO2/SiO2 ARC (−297.3MPa)>TiO2/SiO2ARC(−132.6MPa). Thus, the high packing density of TiO2 gives a better DSE than ZrO2.

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Anisotropic stress mechanisms for different dielectric multi-layer films deposited by ion-beam assisted deposition on flexible substrates

Cited by 3 publications

References 45 publications

Stress mechanism analysis by finite element method for different dielectric films deposited with ion-beam assisted deposition on flexible substrates

Stress mechanism analysis by finite element method for different dielectric films deposited with ion-beam assisted deposition on flexible substrates

Optical response and temperature shielding coatings using tri-layer structure composed of titania/silica/titania

Optical and stress properties of ZrO₂/SiO₂ and TiO₂/SiO₂ anti-reflective coatings deposited by ion-beam-assisted deposition on a flexible substrate

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Anisotropic stress mechanisms for different dielectric multi-layer films deposited by ion-beam assisted deposition on flexible substrates

Cited by 3 publications

References 45 publications

Stress mechanism analysis by finite element method for different dielectric films deposited with ion-beam assisted deposition on flexible substrates

Stress mechanism analysis by finite element method for different dielectric films deposited with ion-beam assisted deposition on flexible substrates

Optical response and temperature shielding coatings using tri-layer structure composed of titania/silica/titania

Optical and stress properties of ZrO2/SiO2 and TiO2/SiO2 anti-reflective coatings deposited by ion-beam-assisted deposition on a flexible substrate

Contact Info

Product

Resources

About

Optical and stress properties of ZrO₂/SiO₂ and TiO₂/SiO₂ anti-reflective coatings deposited by ion-beam-assisted deposition on a flexible substrate