“…The critical RTA crystallization temperature for a-Si film on AZO-coated glass is the same as that for a-Si film on bare glass, as reported in our previous work [27]. Moreover, the situation of Zn 2 SiO 4 new phase formation for the a-Si/ZnO film subjected to high temperature is in accordance with previous results, while the critical temperature (900 1C) herein is slightly higher compared with that in other reports [28,29], which is supposed to be due to the difference in the initial state. The appearance of Zn 2 SiO 4 phase may influence the Si films and Si-based thin-film solar cell property, further investigation is needed to clarify the relation.…”