Annealing of thin B/Nb2N bilayers, B/Nb bilayers and Nb/B/Nb trilayers via rapid thermal processing (RTP)

Abstract

B/Nb and B/Nb(2)N bilayers and Nb/B/Nb trilayers of about 550 nm total thickness have been deposited on Si(100) wafers with 100 nm thermally grown oxide. Nb and B layers were deposited by magnetron sputtering. Nb(2)N layers were prepared by nitridation of Nb films via rapid thermal processing (RTP). The samples were annealed subsequently at temperatures between 600 and 1,200 degrees C in an RTP system under Ar or NH(3) gas flow to study interdiffusion and reactivity of niobium, boron and nitrogen. Formation of phases was investigated by X-ray diffraction (XRD); surface morphology and roughness were studied via scanning electron microscopy (SEM) and atomic force microscopy (AFM), respectively. Elemental depth profiles of selected samples were recorded by secondary ion mass spectrometry (SIMS). Annealing of the B/Nb bilayers and Nb/B/Nb trilayers under Ar leads to the formation of Nb(3)B(2) at 1,200 degrees C at the B/Nb interface. At lower temperatures the high oxygen content in the boron layer is supposed to hinder the formation of borides due to formation of glass-like boron oxides. In NH(3) several niobium nitrides are formed but no boride phases. Here again the reactivity of boron with niobium is suppressed by the high oxygen content and boron oxide formation. During annealing of the B/Nb(2)N bilayers no borides were formed indicating that well-formed Nb(2)N is an effective diffusion barrier for B.

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

“…In the other paper of this type, Mertens and co-workers determined the effects of a rapid thermal annealing process on thin boron -niobium and boron -niobium nitride bilayers and niobium -boron -niobium trilayers. 318 The films (of approximately 500 nm total thickness) were deposited on silicon (100) wafers with the Nb and B layers being deposited by magnetron sputtering and the Nb 2 N layers being prepared by nitridation of Nb films. The samples were annealed at temperatures in the range 600 and 1200 C in a rapid thermal processing system under argon or ammonia gas flow so that the inter-diffusion and reactivity of the niobium, boron and nitrogen could be studied.…”