Annular-beam dual-detection confocal reflectance microscopy for high-speed three-dimensional surface profiling with an extended volume

Lee, Dong Ryoung; Gweon, Dae−Gab; Yoo, Hongki

doi:10.1088/1361-6501/ab4d2e

Cited by 9 publications

(4 citation statements)

References 38 publications

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“…A vortex phase mask is used to modulate the phase of STED xy 's pupil function, while a phase mask is not used for STED z . Therefore, the phase delay terms of STED xy and STED z in equation (1)…”

Section: Theorymentioning

confidence: 99%

“…Optical microscopes are non-invasive and non-contact imaging tools that enable the visualization of specific molecules in high contrast with fluorescent labeling. Especially, confocal microscopes have the ability to reconstruct three-dimensional (3D) images with optically sectioned images by rejecting out-of-focus noise with a confocal pinhole [1][2][3][4]. These advantages allow the optical microscopes to be widely used in biological research.…”

Section: Introductionmentioning

confidence: 99%

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Effects of aberrations on isoSTED microscopy

Lee

2023

Phys. Scr.

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Aberrations are inevitable in optical microscopes and affect the image quality. In STED microscopy, the optical resolution is especially dominated by the performance of depletion pattern. To quench fluorescence only in the periphery of the excitation focus, the depletion focus ideally has a zero-intensity point that is surrounded by a high-intensity crest. Otherwise, distortion of the depletion beam causes unwanted fluorescence inhibition. The influence of aberrations on isoSTED microscopy differs from that on STED microscopy because isoSTED microscopy generates a more complicated shape of the depletion focal spot with two opposing objectives which have different focusing properties. We present analysis that elucidates the effects on the shape, the central minimum intensity, and the peak intensity of the isoSTED pattern regarding primary aberrations such as astigmatism, coma, and spherical aberration when those aberrations are added in the shared beam path and each beam path in the 4Pi-cavity.

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Section: Theorymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Effects of aberrations on isoSTED microscopy

Lee

2023

Phys. Scr.

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“…Since the rate of the height profiling can be as fast as the detector bandwidth, real-time 3D surface profiling is possible. In addition, the limited depth range can be extended by applying beam shaping, such as via an annular beam [120].…”

Section: Dual-detection Confocal Microscopy (Ddcm)mentioning

confidence: 99%

Three-dimensional confocal reflectance microscopy for surface metrology

Kim

Yoo

2021

Meas. Sci. Technol.

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Confocal microscopy uses a confocal aperture in front of a detector to eliminate out-of-focus blur, providing optical sectioning, high spatial resolution, and high contrast. It enables precise three-dimensional (3D) reconstruction of a sample surface. Using objective lenses with high numerical aperture and short wavelength illumination, confocal microscopy offers high spatial resolution in both lateral and axial directions in a non-destructive and non-contact manner. These qualities make confocal microscopy an ideal tool for the inspection and measurement of microscopic samples. One of the limitations of confocal microscopy for 3D surface metrology, however, is its speed. Both lateral and axial scanning is needed to produce a stack of two-dimensional images along the height, and this takes more time. While high-end confocal laser scanning microscopy can acquire a 3D sample surface within a few seconds, an even faster imaging speed is required in some applications, such as in in-line inspection. Various techniques have been proposed to speed up 3D confocal measurements, such as chromatic confocal microscopy, differential confocal microscopy, dual-detection confocal microscopy, and direct-view confocal microscopy. Here, we review the basic principles, theories, scanning methods, and progress of confocal microscopy for surface metrology, and we discuss the latest progress in the field of ultrafast 3D surface measurement. We anticipate that confocal microscopy, which has become one of the standard metrology tools, will continue to evolve for 3D surface measurement.

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“…El rang de mesura amb CCM depèn del grau d'aberració cromàtica de l'objectiu (fins a uns quants mil•límetres) i la resolució vertical depèn de la capacitat de discriminació de la longitud d'ona (fins a dècimes de micròmetres), mentre que amb DCM i DDCM el rang de mesura està limitat pel DOF de l'objectiu. Aquesta profunditat es pot estendre mitjançant la il•luminació amb un feix anular en el pla de la pupil•la d'entrada de l'objectiu [41], amb l'inconvenient de reduir l'eficiència de la llum i limitar la resolució vertical. No obstant, totes aquestes variacions en l'adquisició confocal tenen l'inconvenient de requerir una exploració en el pla (cal rastrejar lateralment un pinhole per reconstruir la topografia de camp complet), limitant el temps d'adquisició tot i que mantenen una bona resolució lateral.…”

Section: Tècnica De Mesura Single-shotunclassified

Estudi i desenvolupament de sensors òptics ultra-ràpids per a metrologia tridimensional de superfícies

Martínez Marín

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(English) Three-dimensional measurement of roughness and shape of a surface provides information about an object properties through surface parameters. These parameters are defined by international standards and can describe the feature behaviour of its surface. The main benefit of using optical measurement techniques is that the sample under inspection does not suffer any damage when measured. With contact-based methods, otherwise, the damages can occur. With the evolution towards industry 4.0, there is a need to measure faster with smaller sensors, in order to have a manufacture-quality control close loop. This leads to the objective of this thesis, which is to develop two ultrafast sensors for 3d surface metrology. The first sensor consists in an evolution of an existing commercial system using conventional techniques. It has to be reduced in dimensions and cost-wise, while increasing its acquisition speed. The second sensor must use a single-shot technique, so that with one single image, the sample's surface's heights can be retrieved. Therefore, the current optical techniques for 3d surface metrology are reviewed. There are classified in three-main categories: classical techniques, single-shot techniques and scanning systems without moving parts. The development of the thesis is divided into two parts, corresponding to each sensor. In the first part, the opto-mechanical design of the sensor is developed, together with its corresponding analysis. One of the most relevant changes is the replacement of the microdisplay with a glass checkerboard pattern. The microdisplay is a critical component for measuring with confocal, so the algorithms have had to be adapted to obtain equivalent results. In addition, sinusoidal movement profiles have been studied to reduce the sensor's downtime and minimize motor wear. In the second part the objective is to demonstrate the feasibility of using CKM (Complementary Kernel Matching) for surface measurement. This technique is based on the image processing after a calibration that analyzes the Point Spread Function (PSF) through the optical axis. In order to demonstrate it, a prototype based on two cameras has been developed, a new calibration method has been designed, which divides the image into smaller regions using a matrix of pinholes. A new algorithm has also been developed to detect the height of the sample from the axial response obtained. Finally, a real sample has been measured with satisfactory results. (Català) La mesura tridimensional de forma i rugositat de textura d’una superfície permet proporcionar informació sobre les propietats d’un objecte a partir d'un conjunt de paràmetres de superfície. Aquests paràmetres estan definits per normatives internacionals i poden descriure directament el comportament de la funcionalitat de la seva superfície. El principal benefici d’utilitzar tècniques de mesura òptiques és que la mostra sota inspecció no pateix danys ni desperfectes a l’hora de ser mesurada, tal i com sí pot succeir en els mètodes de contacte. En el procés actual d’evolució cap a la indústria 4.0, es necessita mesurar més ràpid amb sensors més petits, per tal de tenir un circuit tancat de fabricació-control de qualitat. És per això que l'objectiu d'aquesta tesi és desenvolupar dos sensors ultra-ràpids per a la mesura tridimensional de superfícies. El primer consisteix en evolucionar un equip comercial amb tècniques convencionals en els qual s'ha de reduir les dimensions i els costos dels components, a la vegada que s'augmenta la velocitat d'adquisició. El segon sensor ha de funcionar amb una tècnica single-shot, de manera que amb l'adquisició d'una sola imatge, el sensor ja recuperi les alçades de la superfície de la mostra. En conseqüència, en la tesi es revisen les actuals tècniques de mesura òptiques per a metrologia tridimensional de superfícies. Aquestes es divideixen en tres blocs: tècniques clàssiques, tècniques d'una sola imatge i sistemes d'escombrat sense components mecànics. El desenvolupament de la tesi es divideix en dues parts, que corresponen a cada sensor. En la primera part es desenvolupa el disseny opto-mecànic del sensor, amb el seu anàlisis corresponent. Un dels canvis més rellevants és la substitució del microdisplay per un patró checkerboard de vidre. El microdisplay és un component crític per a poder mesurar amb confocal, de manera que s'han hagut de modificar els algoritmes per a poder obtenir resultats equivalents. Addicionalment s'han estudiat perfils de moviment sinusoïdals per a milllorar el temps productiu del sensor i minimitzar el desgast del motor. En la segona part es vol demostrar la viabilitat conceptual d'emprar CKM (Complementary Kernel Matching) per a la mesura de superfícies. Aquesta tècnica es basa en el processat d'imatge després d'una calibració que analitza la resposta impulsional (PSF) a través de l'eix òptic. Per a demostrar-la, s'ha desenvolupat un prototip basat en dues càmeres, s'ha dissenyat un nou mètode de calibració basat en la divisió de la imatge en finestres gràcies a utilitzar una matriu de pinholes. També s'ha desenvolupat un nou algoritme per a detectar l'alçada de la mostra a partir de la resposta axial obtinguda. Finalment, s'ha mesurat una mostra real amb resultats satisfactoris.

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Annular-beam dual-detection confocal reflectance microscopy for high-speed three-dimensional surface profiling with an extended volume

Cited by 9 publications

References 38 publications

Effects of aberrations on isoSTED microscopy

Effects of aberrations on isoSTED microscopy

Three-dimensional confocal reflectance microscopy for surface metrology

Estudi i desenvolupament de sensors òptics ultra-ràpids per a metrologia tridimensional de superfícies

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